Characterization of water vapor permeation through thin film parylene C

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1892-1895

  Menon, Parvathy Rama ^a   Li, W ^a   Tooker, A ^a   Tai, Y C ^a  

^a California Institute of Technology   (United States)

Author keywords

Microfluidics; Parylene C; Water vapor permeation

Indexed keywords

ARRHENIUS RELATIONS; MICROFLUIDIC STRUCTURES; PARYLENE C; TEMPERATURE TESTING; WATER VAPOR PERMEATION;

ACTIVATION ENERGY; ACTUATORS; MICROFLUIDICS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; THIN FILM DEVICES; THIN FILMS; WATER VAPOR;

SOLID-STATE SENSORS;

EID: 71449116733     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285687     Document Type: Conference Paper

References (3)

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2. W.H. Hubbell, H. Brandt, and Z.A. Munir, "Transient and Steady-state Water Vapor Permeation through Polymer Films," Journal of Polymer Science, Vol. 13, pp. 493-507, 1975.
3. A. Tanioka, N. Fukushima, K. Hasegawa, Miyasaka, and N. Takahashi, "Permeation of Gases Across the Poly(chlorop- xylylene) Membrane," Journal of Applied Polymer Science, Vol. 54, pp. 219-229, 1994.