Study and applications of a parylene self-sealing structure

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 282-285

  Zhang, Huan ^a   Wang, Sheng ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

Annular plate; Parylene; Self sealing structure; Stiction

Indexed keywords

ELECTROLYSIS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OLEFINS; STICTION;

ANNULAR PLATES; MICROCHANNELS; PARYLENE; SELF-SEALING STRUCTURES;

SEALING (FINISHING);

EID: 33750112272     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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