Improved self-sealing liquid encapsulation in parylene structures by integrated stackable annular-plate stiction valve

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 524-527

  Gutierrez, Christian A ^a   Meng, Ellis ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL IMPEDANCE MEASUREMENTS; ELEVATED PRESSURE; IN-PLANE DESIGN; LIQUID VOLUME; MULTI-LAYERED; PARYLENES; PLATE DESIGN; SEALING LIQUID; SEALING STRUCTURES; WAFER LEVEL;

MECHANICAL ENGINEERING; MECHANICS; PLATES (STRUCTURAL COMPONENTS); REACTIVE ION ETCHING; STICTION;

LIQUIDS;

EID: 77952785601     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442451     Document Type: Conference Paper

References (7)

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