SCOPUS 정보 검색 플랫폼

Journal of Physical and Chemical Reference Data

Volumn 39, Issue 3, 2010, Pages

Elastic cross sections for electron collisions with molecules relevant to plasma processing

(8) Yoon, J S a Song, M Y a Kato, H b Hoshino, M b Tanaka, H b Brunger, M J c Buckman, S J c Cho, H d

a National Fusion Research Institute (South Korea)

b SOPHIA UNIVERSITY (Japan)

c FLINDERS UNIVERSITY (Australia)

d Chungnam National University (South Korea)

Author keywords

Differential cross sections; Electron collisions; Integrated elastic scattering cross sections; Momentum transfer cross sections

Indexed keywords

ELASTIC SCATTERING; ELECTRONS; MOLECULES; MOMENTUM TRANSFER; PLASMA COLLISION PROCESSES; PLASMA DEVICES; WELL TESTING;

DIFFERENTIAL CROSS SECTION; ELASTIC CROSS SECTIONS; ELECTRON COLLISION; INELASTIC CROSS SECTIONS; INTEGRATED ELASTIC; LOW ENERGY ELECTRONS; MOMENTUM TRANSFER CROSS SECTIONS; POLYATOMIC MOLECULES;

COLLISIONAL PLASMAS;

EID: 78649441096 PISSN: 00472689 EISSN: None Source Type: Journal
DOI: 10.1063/1.3475647 Document Type: Article

Times cited : (36)

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