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Volumn 35, Issue 4, 2002, Pages 783-793

Elastic scattering of low-energy electrons by NF3

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; HAMILTONIANS; MATHEMATICAL MODELS; NITROGEN COMPOUNDS; PLASMA ETCHING;

EID: 0037186102     PISSN: 09534075     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-4075/35/4/303     Document Type: Article
Times cited : (17)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.