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Volumn 35, Issue 4, 2002, Pages 783-793
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Elastic scattering of low-energy electrons by NF3
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Author keywords
[No Author keywords available]
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Indexed keywords
APPROXIMATION THEORY;
ELECTRON ENERGY LEVELS;
ELECTRON SCATTERING;
HAMILTONIANS;
MATHEMATICAL MODELS;
NITROGEN COMPOUNDS;
PLASMA ETCHING;
ELASTIC SCATTERING;
ATOMIC PHYSICS;
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EID: 0037186102
PISSN: 09534075
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-4075/35/4/303 Document Type: Article |
Times cited : (17)
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References (27)
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