Study of nanocrystalline VO2 thin films prepared by magnetron sputtering and post-oxidation

Chinese Physics B

Volumn 19, Issue 10, 2010, Pages

  Luo, Zhen Fei ^a   Wu, Zhi Ming ^a   Xu, Xiang Dong ^a   Wang, Tao ^a   Jiang, Ya Dong ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Magnetron sputtering; Nanocrystal; Post oxidation; Vanadium dioxide

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; AVERAGE GRAIN SIZE; DIRECT CURRENT MAGNETRON SPUTTERING; GLASS SLIDES; INTER-BAND TRANSITION; MAGNITUDE ORDER; NANO GRAINS; NANOCRYSTALLINES; POST-OXIDATION; RAMAN CHARACTERIZATION; REFLECTION SPECTRA; RESISTANCE DROP; SEMICONDUCTOR-METAL TRANSITION; THEORETICAL CALCULATIONS; UV-VISIBLE; VANADIUM DIOXIDE; XRD;

NANOCRYSTALS; OPTICAL PROPERTIES; OXIDATION; OXYGEN; THIN FILMS; VANADIUM; VANADIUM ALLOYS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MAGNETRON SPUTTERING;

EID: 78649425617     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/19/10/106103     Document Type: Article

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