Molecular dynamical simulations on a-C:H film growth from C and H atomic flux: Effect of incident energy

Chinese Physics Letters

Volumn 27, Issue 8, 2010, Pages

  Quan, Wei Long ^a,b   Li, Hong Xuan ^a   Zhao, Fei ^a   Ji, Li ^a   Du, Wen ^a   Zhou, Hui Di ^a   Chen, Jian Min ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b LANZHOU JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS;

A-C:H FILMS; ABSTRACTION REACTIONS; ATOMIC FLUXES; C ATOMS; DYNAMICAL SIMULATION; INCIDENT ENERGY; SHALLOW IMPLANTATION; TWO-STEP PROCESS;

FILM GROWTH;

EID: 78649381163     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/27/8/088102     Document Type: Article

References (23)

1. Bai S Y, Tang Z A, Huang Z X, Yu J, Wang J and Liu G C 2009 Chin. Phys. Lett. 26 076601
2. Ji L, Li H X, Zhao F, Quan W L, Chen J M and Zhou H D 2009 Appl. Surf. Sci. 255 8409
3. Dai H Y, Wang L W, Jiang H and Huang N K 2007 Chin. Phys. Lett. 24 2122
4. Silinskas M, Grigonis A, Kulikauskas V and Manika I 2008 Thin Solid Films 516 1683
5. Erdemir A and Eryilmaz O L 2007 Superlubricity 253
6. Fontaine J and Donnet C 2007 Superlubricity 273
7. Hainsworth S V and Uhrue N J 2007 Int. Mater. Rev. 52 153
8. Robertson J 2002 Mater. Sci. Eng. R 37 129
9. Andersson J, Erck R A and Erdemir A 2003 Wear 254 1070
10. Yoshizawa N, Yamada Y and Shiraishi M 1993 Carbon 31 1049
11. Guo C T and Chen P C 2007 Appl. Surf. Sci. 253 9191
12. Miyagawa Y, Nakao S, Ikeyama M and Miyagawa S 2001 Surf. Coat. Technol. 136 122
13. Miyagawa Y, Nakadate H, Tanaka M and Miyagawa S 2002 Surf. Coat. Technol. 156 87
14. Miyagawa Y, Nakadate H, Ikeyama M, Nakao S and Miyagawa S 2003 Diamond Relat. Mater. 12 927
15. Neyts E, Bogaerts A and van de Sanden M C M 2006 Appl. Phys. Lett. 88 141922
16. Neyts E, Bogaerts A and van de Sanden M C M 2006 J. Appl. Phys. 99 014902
17. Neyts E, Bogaerts A and van de Sanden M C M 2007 J. Phys: Conf. Series 86 012020
18. Neyts E, Eckert M and Bogaerts A 2007 Chem. Vap. Deposition 13 312
19. Quan W L, Li H X, Zhao F, Ji L, Du W, Zhou H D and Chen J M 2010 Phys. Lett. A 374 2150
20. Berendsen H J C, Postma J P M, Vangunsteren W F, Dinola A and Haark J R 1984 J. Chem. Phys. 81 3684
21. Hu Y H and Sinnott S B 2004 J. Comput. Phys. 200 251
22. Brenner D W, Shenderova O A, Harrison J A, Stuart S J, Ni B and Sinnott S B 2002 J. Phys.: Condens. Matter. 14 783
23. Allen M P and Tildesley D J 1987 Computer Simulation of Liquids (Oxford: Oxford University) p 82