Dynamic MC simulation of DLC films synthesis by PBII

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 87-91

  Miyagawa, Yoshiko ^a   Nakadate, Hiroshi ^b   Tanaka, Masaaki ^b   Miyagawa, Soji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b CRC Solutions Institute Inc   (Japan)

Author keywords

Diamond like carbon; DLC film; Dynamic Monte Carlo simulation; PBII; Plasma deposition

Indexed keywords

COMPUTER SIMULATION; ION IMPLANTATION; MONTE CARLO METHODS; PLASMA APPLICATIONS; SYNTHESIS (CHEMICAL);

CHEMICAL INCORPORATION;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0036642206     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00128-7     Document Type: Article

References (10)