Gas permeation in PDMS monitored by on-site pressure sensors

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 352-355

  Yang, Lung Jieh ^a   Kao, A Fu ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

CO2; PDMS; Permeation; Pressure sensor

Indexed keywords

CO2; DIFFERENT THICKNESS; DIFFUSION COEFFICIENTS; DIFFUSION MECHANISMS; GAS PERMEATION; OUTPUT VOLTAGES; PDMS; PDMS CHIPS; PDMS MEMBRANE; PRESSURE TESTING; PYREX 7740 GLASS; THICKNESS EFFECT; TIME HISTORY; V GROOVES;

DIFFUSION; GAS PERMEABLE MEMBRANES; PERMEATION; PRESSURE SENSORS;

MICROCHANNELS;

EID: 78649270762     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592233     Document Type: Conference Paper

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