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Volumn 509, Issue 2, 2011, Pages 384-386
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The effect of NH3 concentrations on the electrical properties of N-doped ZnO and study on mechanism
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Author keywords
Electrical properties; Sputtering; Thin films
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Indexed keywords
ELECTRICAL PROPERTY;
HALL MEASUREMENTS;
N-DOPED;
P-TYPE ZNO FILM;
PREFERENTIAL ORIENTATION;
RF-MAGNETRON SPUTTERING;
SEM;
WURZITE;
XPS;
XPS MEASUREMENTS;
XRD;
ZNO FILMS;
MAGNETRON SPUTTERING;
METALLIC FILMS;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZINC OXIDE;
ELECTRIC PROPERTIES;
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EID: 78149283203
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2010.09.032 Document Type: Article |
Times cited : (13)
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References (17)
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