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Volumn 273, Issue 3-4, 2005, Pages 451-457
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P-type Zno thin films fabricated by Al-N co-doping method at different substrate temperature
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Author keywords
A1. Co doping; A1. P type conduction; A3. DC magnetron reactive sputtering; B1. Zinc compounds; B2. Semiconducting II VI materials
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Indexed keywords
CONCENTRATION (PROCESS);
LIGHT EMITTING DIODES;
MAGNETRON SPUTTERING;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTOR MATERIALS;
SUBSTRATES;
THIN FILMS;
ULTRAVIOLET RADIATION;
X RAY DIFFRACTION ANALYSIS;
CO-DOPING;
DC MAGNETRON REACTIVE SPUTTERING;
P-TYPE CONDUCTION;
SEMICONDUCTING II-VI MATERIALS;
ZINC COMPOUNDS;
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EID: 10644261283
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.09.042 Document Type: Article |
Times cited : (12)
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References (22)
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