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Volumn 312, Issue 24, 2010, Pages 3599-3602

Crystallization of sputtered amorphous silicon induced by silvercopper alloy with high crystalline volumeratio

Author keywords

A1. Recrystallization; A3. Alloy induced crystallization; A3. Magnetron sputtering; B1. Polycrystalline silicon; B1. Semiconducting silicon

Indexed keywords

A3. ALLOY-INDUCED CRYSTALLIZATION; A3. MAGNETRON SPUTTERING; B1. SEMICONDUCTING SILICON; POLY-CRYSTALLINE SILICON; RECRYSTALLIZATIONS;

EID: 78149281732     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2010.09.068     Document Type: Article
Times cited : (8)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.