Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 145-149

  Mengucci, P ^a   Barucca, G ^a   D'Anna, E ^a   Jergel, M ^b   Luby, S ^b   Majkova, E ^b   Martino, M ^a  

^a INFM   (Italy)

^b INSTITUTE OF PHYSICS   (Slovakia)

Author keywords

a Si crystallisation; Cobalt disilicide; Cross sectional transmission electron microscopy; Grazing incidence X ray diffraction; Laser irradiation; Thin films

Indexed keywords

EID: 0345921766     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00528-5     Document Type: Article

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