Thermal flow sensor for liquids and gases

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 351-355

  Ashauer, M ^a   Glosch, H ^a   Hedrich, F ^a   Hey, N ^a   Sandmaier, H ^a   Lang, W ^a  

^a Hahn Schickard Gesellschaft   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW MEASUREMENT; HEAT FLUX; TEMPERATURE MEASUREMENT;

THERMAL FLOW SENSORS;

SENSORS;

EID: 0031654768     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)