Comparison of the dynamic response of calorimetric and hot-film flow transducers

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 341-344

  Kohl, F ^a   Beigelbeck, R ^a   Cerimovic, S ^a   Talic, A ^a   Schalko, J ^b   Jachimowicz, A ^b  

^a ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETRY; DYNAMIC RESPONSE; FLOW VELOCITY; MATHEMATICAL MODELS; TRANSDUCERS;

DYNAMIC BEHAVIORS; FILM FLOWS; FILM TRANSDUCERS; FLOW SENSORS; FLUID VELOCITIES; GASEOUS FLUIDS; GEOMETRY PARAMETERS; HEAT SOURCES; HOT FILM SENSORS; MICROMACHINED; NUMERICAL SIMULATIONS; RESPONSE TIMES;

SENSORS;

EID: 48349131226     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388405     Document Type: Conference Paper

References (4)

1. F. Kohl, R. Beigelbeok, P. Losohmidt, J. Kuntner, Artur Jaohimowioz, "FEM-Based Analysis of Micromachined Calorimetrio Flow Sensors", Poster T3B-P1, to appear in CD-ROM Proceedings Sensor 2006, Oot. 22-25, 2006, EXCO Daegu, Korea.
2. F. Kohl, R. Fasohing, F. Keplinger, R. Chabioovsky, A. Jaohimowioz, G. Urban, "Development of miniaturized semioonduotor flow sensors", Measurement, vol. 33, pp. 109-119, 2003.
3. F. Mailly, A. Giani, R. Bonnot, P. Temple-Boyer, F. PasoalDelannoy, A. Fouoaran, A. Boyer, "Anemometer with hot platinum thin film", Sensors and Aotuators A 94, pp. 32-38, 2001.
4. N.T. Nguyen, W. Dötzel, "Asymmetrioal looations of heaters and sensors relative to eaoh other using heater arrays: a novel method for designing multi-range eleotrocaloric mass-flow sensors", Sensors and Aotuators A 62, pp. 506-512, 1997.