Design and fabrication of a flow sensor detecting flow direction and velocity

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1927-1930

  Kim, Seunghyun ^a   Kim, Sunghyun ^a   Kim, Yongduk ^a   Choi, Sieyoung ^a   Park, Sekwang ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Application specific integrated circuits; CMOS technology; Detectors; Energy consumption; Fabrication; Instruments; Integrated circuit technology; Micromechanical devices; Operational amplifiers; Thermal sensors

Indexed keywords

ACTUATORS; AMPLIFIERS (ELECTRONIC); ANALOG INTEGRATED CIRCUITS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; BRIDGE CIRCUITS; CMOS INTEGRATED CIRCUITS; DETECTORS; DIFFERENTIAL AMPLIFIERS; ENERGY UTILIZATION; FABRICATION; INSTRUMENTS; INTEGRATED CIRCUIT DESIGN; INTEGRATED CIRCUITS; MICROSYSTEMS; OPERATIONAL AMPLIFIERS; TRANSDUCERS; VELOCITY;

CMOS TECHNOLOGY; INSTRUMENTATION AMPLIFIER; INTEGRATED CIRCUIT TECHNOLOGY; INTERFACE CIRCUITS; MICROMECHANICAL DEVICE; THERMAL FLOW SENSOR; THERMAL SENSORS; WHEATSTONE BRIDGE CIRCUITS;

SOLID-STATE SENSORS;

EID: 37149011268     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217169     Document Type: Conference Paper

References (8)

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