SCOPUS 정보 검색 플랫폼

Volumn 84, Issue 11, 2010, Pages 1347-1352

Deposition and characterization of smooth ultra-nanocrystalline diamond film in CH4/H2/Ar by microwave plasma chemical vapor deposition

(3) Zou, Y S a Li, Z X a Wu, Y F a

a NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

Author keywords

Grain size; Microwave plasma chemical vapor deposition; Surface smoothness; Ultra nanocrystalline diamond film

Indexed keywords

10 MICRON; AFM; AR PLASMAS; ARGON CONCENTRATION; FILM DEPOSITION; FORCE MICROSCOPY; GRAIN SIZE; MEDICAL IMPLANTS; MICROELECTROMECHANICAL SYSTEMS; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; NEGATIVE BIAS; SEM; SI (100) SUBSTRATE; SURFACE ACOUSTIC WAVE DEVICE; SURFACE SMOOTHNESS; ULTRA-NANOCRYSTALLINE DIAMOND; UV-RAMAN SPECTROSCOPY;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ARGON; ATOMIC SPECTROSCOPY; BIAS VOLTAGE; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMONDS; DOSIMETRY; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; MICROWAVES; PLASMA DEPOSITION; PLASMAS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; SURFACE ROUGHNESS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

DIAMOND FILMS;

EID: 78049440854 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2010.03.002 Document Type: Article

Times cited : (23)

References (30)

1
- 0004162818
- Academic Press London
- J.E. Field The properties of natural and synthetic diamond 1992 Academic Press London
- (1992) The Properties of Natural and Synthetic Diamond
- Field, J.E.¹

2
- 5444223149
- A. Hartl, E. Schmich, J.A. Garrido, J. Hernando, S.C.R. Catharino, and S. Walter Nat Mater 3 2004 736
- (2004) Nat Mater , vol.3 , pp. 736
- Hartl, A.¹ Schmich, E.² Garrido, J.A.³ Hernando, J.⁴ Catharino, S.C.R.⁵ Walter, S.⁶

3
- 0037314886
- D.C. Shin, B.V. Sarada, D.A. Tryk, A. Fujishima, and J. Wang Anal Chem 75 2003 530
- (2003) Anal Chem , vol.75 , pp. 530
- Shin, D.C.¹ Sarada, B.V.² Tryk, D.A.³ Fujishima, A.⁴ Wang, J.⁵

4
- 0037545951
- W.J. Zhang, X.M. Meng, C.Y. Chan, Y. Wu, I. Bello, and S.T. Lee Appl Phys Lett 82 2003 2622
- (2003) Appl Phys Lett , vol.82 , pp. 2622
- Zhang, W.J.¹ Meng, X.M.² Chan, C.Y.³ Wu, Y.⁴ Bello, I.⁵ Lee, S.T.⁶

5
- 61449171056
- Y.S. Zou, Y. Yang, Y.M. Chong, Q. Ye, B. He, and Z.Q. Yao Cryst Growth Des 8 2008 1770
- (2008) Cryst Growth des , vol.8 , pp. 1770
- Zou, Y.S.¹ Yang, Y.² Chong, Y.M.³ Ye, Q.⁴ He, B.⁵ Yao, Z.Q.⁶

6
- 0035505750
- M.S. Kang, W.S. Lee, and Y.J. Baika Thin Solid Films 398-399 2001 175
- (2001) Thin Solid Films , vol.398-399 , pp. 175
- Kang, M.S.¹ Lee, W.S.² Baika, Y.J.³

7
- 2442610775
- T. Lamara, M. Belmahi, O. Elmazria, L.L. Brizoual, J. Bougdira, and M. Remy Diam Relat Mater 13 2004 581
- (2004) Diam Relat Mater , vol.13 , pp. 581
- Lamara, T.¹ Belmahi, M.² Elmazria, O.³ Brizoual, L.L.⁴ Bougdira, J.⁵ Remy, M.⁶

8
- 46549087997
- W.C. Clem, S. Chowdhury, S.A. Catledge, J.J. Weimer, F.M. Shaikh, and K.M. Hennessy Biomaterials 29 2008 3461
- (2008) Biomaterials , vol.29 , pp. 3461
- Clem, W.C.¹ Chowdhury, S.² Catledge, S.A.³ Weimer, J.J.⁴ Shaikh, F.M.⁵ Hennessy, K.M.⁶

9
- 79955992195
- V. Mortet, O. Elmazria, M. Nesladek, M.B. Assouar, G. Vanhoyland, and J. D'Haen Appl Phys Lett 81 2002 1720
- (2002) Appl Phys Lett , vol.81 , pp. 1720
- Mortet, V.¹ Elmazria, O.² Nesladek, M.³ Assouar, M.B.⁴ Vanhoyland, G.⁵ D'Haen, J.⁶

10
- 1542288009
- F. Bénédic, M.B. Assouar, F. Mohasseb, O. Elmazria, P. Alnot, and A. Gicquel Diam Relat Mater 13 2004 347
- (2004) Diam Relat Mater , vol.13 , pp. 347
- Bénédic, F.¹ Assouar, M.B.² Mohasseb, F.³ Elmazria, O.⁴ Alnot, P.⁵ Gicquel, A.⁶

11
- 42449089710
- D. Zhou, D.M. Gruen, L.C. Qin, T.G. McCauley, and A.R. Krauss J Appl Phys 1998 1981 84
- (1981) J Appl Phys , vol.1998 , pp. 84
- Zhou, D.¹ Gruen, D.M.² Qin, L.C.³ McCauley, T.G.⁴ Krauss, A.R.⁵

12
- 33845450393
- D.M. Gruen Ann Rev Mater Sci 29 1999 211
- (1999) Ann Rev Mater Sci , vol.29 , pp. 211
- Gruen, D.M.¹

13
- 0035396993
- S. Jiao, A. Sumant, M.A. Kirk, D.M. Gruen, A.R. Krauss, and O. Auciello J Appl Phys 90 2001 118
- (2001) J Appl Phys , vol.90 , pp. 118
- Jiao, S.¹ Sumant, A.² Kirk, M.A.³ Gruen, D.M.⁴ Krauss, A.R.⁵ Auciello, O.⁶

14
- 38849191130
- S.J. Askari, and F.X. Lu Vacuum 82 2008 673
- (2008) Vacuum , vol.82 , pp. 673
- Askari, S.J.¹ Lu, F.X.²

15
- 34047254315
- D. Monéger, F. Bénédic, R. Azouani, F. Chelibane, O. Syll, and F. Silva Diam Relat Mater 16 2007 1295
- (2007) Diam Relat Mater , vol.16 , pp. 1295
- Monéger, D.¹ Bénédic, F.² Azouani, R.³ Chelibane, F.⁴ Syll, O.⁵ Silva, F.⁶

16
- 9644259091
- J.E. Gerbi, J. Birrell, M. Sardela, and J.A. Carlisle Thin Solid Films 473 2005 41
- (2005) Thin Solid Films , vol.473 , pp. 41
- Gerbi, J.E.¹ Birrell, J.² Sardela, M.³ Carlisle, J.A.⁴

17
- 0032058066
- L.C. Qin, D. Zhou, A.R. Krauss, and D.M. Gruen Nanostruct Mater 10 1998 649
- (1998) Nanostruct Mater , vol.10 , pp. 649
- Qin, L.C.¹ Zhou, D.² Krauss, A.R.³ Gruen, D.M.⁴

18
- 43049119333
- Y.C. Lee, S.J. Lin, V. Buck, R. Kunze, H. Schmidt, and C.Y. Lin Diam Relat Mater 17 2008 446
- (2008) Diam Relat Mater , vol.17 , pp. 446
- Lee, Y.C.¹ Lin, S.J.² Buck, V.³ Kunze, R.⁴ Schmidt, H.⁵ Lin, C.Y.⁶

19
- 34047127366
- S. Srinivasan, J. Hiller, B. Kabius, and O. Auciello Appl Phys Lett 90 2007 134101
- (2007) Appl Phys Lett , vol.90 , pp. 134101
- Srinivasan, S.¹ Hiller, J.² Kabius, B.³ Auciello, O.⁴

20
- 33644917133
- C.H. Chou, Y.C. Lin, J.H. Huang, N.H. Tai, and I.N. Lin Diam Relat Mater 15 2006 404
- (2006) Diam Relat Mater , vol.15 , pp. 404
- Chou, C.H.¹ Lin, Y.C.² Huang, J.H.³ Tai, N.H.⁴ Lin, I.N.⁵

21
- 2342453935
- H. Kuzmany, R. Pfeiffer, N. Salk, and B. Gunther Carbon 42 2004 911
- (2004) Carbon , vol.42 , pp. 911
- Kuzmany, H.¹ Pfeiffer, R.² Salk, N.³ Gunther, B.⁴

22
- 0001303281
- A.C. Ferrari, and J. Robertson Phys Rev B 63 2001 121405
- (2001) Phys Rev B , vol.63 , pp. 121405
- Ferrari, A.C.¹ Robertson, J.²

23
- 29144477771
- J.R. Rabeau, P. John, J.I.B. Wilson, and Y. Fan J Appl Phys 96 2004 6724
- (2004) J Appl Phys , vol.96 , pp. 6724
- Rabeau, J.R.¹ John, P.² Wilson, J.I.B.³ Fan, Y.⁴

24
- 42949141700
- S. Chowdhury, J. Borham, S.A. Catledge, A.W. Eberhardt, P.S. Johnson, and Y.K. Vohra Diam Relat Mater 17 2008 419
- (2008) Diam Relat Mater , vol.17 , pp. 419
- Chowdhury, S.¹ Borham, J.² Catledge, S.A.³ Eberhardt, A.W.⁴ Johnson, P.S.⁵ Vohra, Y.K.⁶

25
- 0037465324
- Y. Show, M.A. Witek, P. Sonthalia, and G.M. Swain Chem Mater 15 2003 879
- (2003) Chem Mater , vol.15 , pp. 879
- Show, Y.¹ Witek, M.A.² Sonthalia, P.³ Swain, G.M.⁴

26
- 9644301160
- J. Birrell, J.E. Gerbi, O. Auciello, J.M. Gibson, J. Johnson, and J.A. Carlisle Diam Relat Mater 14 2005 86
- (2005) Diam Relat Mater , vol.14 , pp. 86
- Birrell, J.¹ Gerbi, J.E.² Auciello, O.³ Gibson, J.M.⁴ Johnson, J.⁵ Carlisle, J.A.⁶

27
- 21544484514
- S.J. Harris Appl Phys Lett 56 1990 2298
- (1990) Appl Phys Lett , vol.56 , pp. 2298
- Harris, S.J.¹

28
- 0032166786
- D.M. Gruen MRS Bull 23 1998 32
- (1998) MRS Bull , vol.23 , pp. 32
- Gruen, D.M.¹

29
- 0037081479
- P. Zapol, M. Sternberg, L.A. Curtiss, T. Frauenheim, and D.M. Gruen Phys Rev B 65 2001 045403
- (2001) Phys Rev B , vol.65 , pp. 045403
- Zapol, P.¹ Sternberg, M.² Curtiss, L.A.³ Frauenheim, T.⁴ Gruen, D.M.⁵

30
- 34047247036
- Y.S. Zou, K.L. Ma, W.J. Zhang, Q. Ye, Z.Q. Yao, and Y.M. Chong Diam Relat Mater 16 2007 1208
- (2007) Diam Relat Mater , vol.16 , pp. 1208
- Zou, Y.S.¹ Ma, K.L.² Zhang, W.J.³ Ye, Q.⁴ Yao, Z.Q.⁵ Chong, Y.M.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.