Deposition of nanocrystalline diamond films in pulsed Ar/H2/CH4 microwave discharges

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1295-1299

  Moneger D ^a   Benedic F ^a   Azouani, R ^a   Chelibane, F ^a   Syll, O ^a   Silva, F ^a   Gicquel, A ^a  

^a UNIVERSITÉ PARIS 13   (France)

Author keywords

Diamond film; Nanocrystalline; Plasma CVD; Pulsed mode

Indexed keywords

FILM GROWTH; GAS MIXTURES; MICROSTRUCTURE; MICROWAVES; NANOCRYSTALLINE MATERIALS; PLASMA STABILITY;

MICROWAVE DISCHARGES; NANOCRYSTALLINE DIAMOND FILMS; PULSED MODES; TIME-AVERAGE MICROWAVE POWER; TOPOGRAPHY PROPERTIES;

DIAMOND FILMS;

EID: 34047254315     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.11.098     Document Type: Article

References (19)

1. Noda V., Kusakabe H., Taniguchi K., and Maruno S. Jpn. J. Appl. Phys. 33 (1994) 4400
2. Tallaire A., Achard J., Secroun A., De Gryse O., De Weerdt F., Barjon J., Silva F., and Gicquel A. J. Cryst. Growth 291 (2006) 533
3. Hatta A., Kadota K., Mori Y., Ito T., Sasaki T., Hiraki A., and Okada S. Appl. Phys. Lett. 66 (1995) 1602
4. Lamara T., Belmahi M., Bougdira J., Bénédic F., Henrion G., and Rémy M. Surf. Coat. Technol. 174-175 (2003) 784
5. Hassouni K., Duten X., Rousseau A., and Gicquel A. Plasma Sources Sci. Technol. 10 (2001) 61
6. de Poucques L., Bougdira J., Hugon R., Henrion G., and Alnot P. J. Phys. D: Appl. Phys. 34 (2001) 896
7. Lombardi G., Duten X., Hassouni K., Rousseau A., and Gicquel A. J. Electrochem. Soc. 150 (2003) 311
8. Zhou D., McCauley T.G., Qin L.C., Krauss A.R., and Gruen D.M. J. Appl. Phys. 83 (1998) 540
9. Liu Y., Liu C., Chen Y., Tzeng T., Tso P., and Lin I. Diamond Relat. Mater. 13 (2004) 671
10. Hassouni K., Mohasseb F., Bénédic F., Lombardi G., and Gicquel A. Pure Appl. Chem. 78 (2006) 1127
11. Gruen D.M. Ann. Rev. Mater. Sci. 29 (1999) 211
12. Bruno P., Bénédic F., Mohasseb F., Lombardi G., Silva F., and Hassouni K. J. Phys. D: Appl. Phys. 37 (2004) L35
13. Hassouni K., Grotjohn T., and Gicquel A. J. Appl. Phys. 86 (1999) 134
14. Cicala G., Bruno P., Bénédic F., Silva F., Hassouni K., and Senesi G.S. Diamond Relat. Mater. 14 (2005) 421
15. Lombardi G., Bénédic F., Mohasseb F., Hassouni K., and Gicquel A. Plasma Sources Sci. Technol. 13 (2004) 375
16. Klug H., and Alexander L. X-ray diffraction procedures for crystalline and amorphous materials (1974), John Wiley and Sons, New York 618
17. Silva F., Bénédic F., Bruno P., and Gicquel A. Diamond Relat. Mater. 14 (2005) 398
18. Ferrari A.C., and Robertson J. Philos. Trans. R. Soc. London, Ser. A 362 (2004) 2477
19. Lombardi G., Hassouni K., Bénédic F., Mohasseb F., Röpcke J., and Gicquel A. J. Appl. Phys. 96 (2004) 6739