Assessment of the mechanical integrity of silicon and diamond-like carbon coated silicon atomic force microscope probes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7767, Issue , 2010, Pages

  Liu, Jingjing ^a   Grierson, David S ^a   Sridharan, Kumar ^a   Carpick, Robert W ^b   Turner, Kevin T ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE FORCE; AFM; AFM TIP; ATOMIC FORCE MICROSCOPES; CATASTROPHIC FAILURES; COATED TIPS; CONTACT-MODE AFM; CRITICAL ISSUES; DEPOSITION PROCESS; DIAMOND-LIKE CARBON; EXTERNAL LOADS; IMAGING PERFORMANCE; MECHANICAL INTEGRITY; NANO-MANUFACTURING; NANOSCALE WEAR; PLASMA ION IMPLANTATION; POWER SPECTRAL DENSITY ANALYSIS; PROBE-BASED; SCANNING CONDITIONS; SILICON TIPS; STRESS-DEPENDENT; WEAR TEST;

INSTRUMENTS; ION IMPLANTATION; MEASUREMENTS; PLASMA DEPOSITION; POWER SPECTRAL DENSITY; PROBES; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC FORCE MICROSCOPY;

EID: 78049397051     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.861789     Document Type: Conference Paper

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