Imaging at the nano-scale

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 2, Issue , 2003, Pages 715-722

  El Rifai, O M ^a   Aumond, B D ^b   Youcef Toumi, K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Surface Logix   (United States)

Author keywords

Atomic force microscopy; Manufacturing processes; Mechanical engineering; Optical imaging; Optical interferometry; Optical scattering; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface topography

Indexed keywords

ASPECT RATIO; INTELLIGENT MECHATRONICS; MANUFACTURE; MECHANICAL ENGINEERING; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

MANUFACTURING PROCESS; OPTICAL IMAGING; OPTICAL INTERFEROMETRY; OPTICAL SCATTERING; ROUGH SURFACES;

ATOMIC FORCE MICROSCOPY;

EID: 33745623789     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2003.1225431     Document Type: Conference Paper

References (15)

1. S. I. Association, International Technology Roadmap for Semiconductors: 2000 update. Austin, TX: International SEMATECH, 2000.
2. D. G. Chettwynd and S. T. Smith, "High precision surface profilometry: From stylus to stm," From Instrumentation to Nanotechnology.
3. B. Aumond, High Precision Stereo Profilometry. Mechanical Engineering PhD. Thesis, MIT, Cambridge, Massachusetts, June 2001.
4. G. Pingali and R. Jain, "Restoration of scanning probe microscope images," Proc. IEEE Workshop on Applications of Computer Vision, pp. 282-289, 1992.
5. B. Aumond and K. Youcef-Toumi, "High precision stereo profilometry based on atomic force microscopy technology," Proceedings of the Mechatronics 2000 Conference, Atlanta, Georgia, September, 2000.
6. J. Villarubia, "Reconstruction of stm and afm images distorted by finite-size tips," Surface Science, vol. 321, pp. 287-300, 1994.
7. Y. Yeo, "Image processing for precision atomic force microscopy," Mechanical Engineering M.S. Thesis, MIT. Cambridge, Massachusetts, June 2000.
8. O. M. E. Rifai and K. Youcef-Toumi, "Dynamics of contact-mode atomic force microscopes," American Control Conference, Chicago, Illinois, USA, June 28-30, pp. 2118-2122, 2000.
9. -, "Coupling in piezoelectric tube scanners used in scanning probe microscopes," American Control Conference, Arlington, Virginia, USA, June 25-27, pp. 3251-3255, 2001.
10. -, "Dynamics of atomic force microscopes: Experiments and simulations," IEEE Conference on Control Applications, Scotland, Setember 18-20, pp. 1126-1131, 2002.
11. O. M. E. Rifai, Modeling and Control of Undesirable Dynamics of Atomic Force Microscopes. Mechanical Engineering PhD. Thesis, MIT, Cambridge, Massachussets, February 2002.
12. G. Goodwin, A. Woodyatt, R. Middleton, and J. Shim, "Fundamental limitations due to jω-axis zeros in siso systems," Automatica,, vol. 35, pp. 857-863, 1999.
13. J. S. Villarubia, "Scanned probe microscope tip characterization without calibrated tip characterizers," J. Vac. Sci. Technol. B, vol. 14 (2), pp. 1518-1521, 1996.
14. P. M. Williams, K. M. Shakesheff, M. C. Davies, D. E. Jackson, C. J. Roberts, and S. J. B. Tendler, "Blind reconstruction of scanning probe image data," J. Vac. Sci. Technol. B, vol. 14 (2), pp. 1557-1562, 1996.
15. S. Dongmo, M. Troyon, P. Vautrot, E. Delain, and N. Bonnet, "Blind restoration method of scanning tunneling and atomic force microscopy images," J. Vac. Sci. Technol. B, vol. 14 (2), pp. 1552-1556, 1996.