SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 101, Issue 2, 2010, Pages 361-365

Multipulse feedback in self-organized ripples formation upon femtosecond laser ablation from silicon

(6) Reif, Juergen a Varlamova, Olga a Ratzke, Markus a Schade, Martin b Leipner, Hartmut S b Arguirov, Tzanimir c

a BRANDENBURG UNIVERSITY OF TECHNOLOGY (Germany)

b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG (Germany)

c IHP (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; CRYSTALLINE AND AMORPHOUS SILICON; DOSE ACCUMULATION; FEATURE SIZES; FEEDBACK EFFECTS; FEMTOSECOND LASER ABLATION; IRRADIATED AREA; IRRADIATION DOSE; LASER INTERACTION; MODIFIED SURFACES; MULTIPULSES; OUT-DIFFUSION; PERTURBATION DECAYS; POSITIVE FEEDBACK; PULSE SEPARATIONS; RIPPLES FORMATION; SELF-ORGANIZED; SELF-ORGANIZED NANOSTRUCTURES; SEM; SILICON SURFACES; STRUCTURAL MODIFICATIONS; STRUCTURE FORMATIONS; TARGET SURFACE; TIME INTERVAL;

FEEDBACK; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LASER ABLATION; PULSED LASER APPLICATIONS; ULTRASHORT PULSES;

AMORPHOUS SILICON;

EID: 78049343782 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-5830-x Document Type: Article

Times cited : (42)

References (28)

1
- 0000050015
- Microstructuring of silicon with femtosecond laser pulses
- DOI 10.1063/1.122241, PII S0003695198012388
- T.-H. Her, et al. 1998 Appl. Phys. Lett. 73 1673 10.1063/1.122241 1998ApPhL..73.1673H (Pubitemid 128671948)
- (1998) Applied Physics Letters , vol.73 , Issue.12 , pp. 1673-1675
- Her, T.-H.¹ Finlay, R.J.² Wu, C.³ Deliwala, S.⁴ Mazur, E.⁵

2
- 0033414039
- J. Krüger W. Kautek 1999 Laser Phys. 9 30
- (1999) Laser Phys. , vol.9 , pp. 30
- Krüger, J.¹ Kautek, W.²

3
- 34247208687
- Effect of surface roughening on femtosecond laser-induced ripple structures
- DOI 10.1063/1.2720709
- T. Tomita, et al. 2007 Appl. Phys. Lett. 90 153115 10.1063/1.2720709 2007ApPhL..90o3115T (Pubitemid 46609887)
- (2007) Applied Physics Letters , vol.90 , Issue.15 , pp. 153115
- Tomita, T.¹ Kinoshita, K.² Matsuo, S.³ Hashimoto, S.⁴

4
- 40849134246
- High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon
- DOI 10.1063/1.2885111
- T.H.R. Crawford, et al. 2008 J. Appl. Phys. 103 053104 10.1063/1.2885111 2008JAP...103e3104C (Pubitemid 351394050)
- (2008) Journal of Applied Physics , vol.103 , Issue.5 , pp. 053104
- Crawford, T.H.R.¹ Yamanaka, J.² Botton, G.A.³ Haugen, H.K.⁴

5
- 0038374098
- 10.1063/1.1586457 2003ApPhL.82.4462B
- A. Borowiec H.K. Haugen 2003 Appl. Phys. Lett. 82 4462 10.1063/1.1586457 2003ApPhL..82.4462B
- (2003) Appl. Phys. Lett. , vol.82 , pp. 4462
- Borowiec, A.¹ Haugen, H.K.²

6
- 4344678019
- 10.1007/s00339-004-2803-y 2004ApPhA.79.1429C
- F. Costache, et al. 2004 Appl. Phys. A 79 1429 10.1007/s00339-004-2803-y 2004ApPhA..79.1429C
- (2004) Appl. Phys. A , vol.79 , pp. 1429
- Costache, F.¹

7
- 33646569463
- Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light
- DOI 10.1016/j.apsusc.2005.08.120, PII S0169433205013991
- O. Varlamova, et al. 2006 Appl. Surf. Sci. 252 4702 10.1016/j.apsusc. 2005.08.120 2006ApSS..252.4702V (Pubitemid 43729218)
- (2006) Applied Surface Science , vol.252 , Issue.SPEC. ISS. , pp. 4702-4706
- Varlamova, O.¹ Costache, F.² Reif, J.³ Bestehorn, M.⁴

8
- 34447331296
- Control parameters in pattern formation upon femtosecond laser ablation
- DOI 10.1016/j.apsusc.2007.02.067, PII S0169433207002863, Photon-Assisted Synthesis and Processing of Functional Materials
- O. Varlamova, et al. 2007 Appl. Surf. Sci. 253 7932 10.1016/j.apsusc. 2007.02.067 2007ApSS..253.7932V (Pubitemid 47058681)
- (2007) Applied Surface Science , vol.253 , Issue.19 , pp. 7932-7936
- Varlamova, O.¹ Costache, F.² Ratzke, M.³ Reif, J.⁴

9
- 0346058238
- 10.1103/PhysRevLett.91.225502 2003PhRvL.91v5502L
- P. Lorazo, et al. 2003 Phys. Rev. Lett. 91 225502 10.1103/PhysRevLett.91. 225502 2003PhRvL..91v5502L
- (2003) Phys. Rev. Lett. , vol.91
- Lorazo, P.¹

10
- 33646553582
- Time-resolved diffraction profiles and atomic dynamics in short-pulse laser-induced structural transformations: Molecular dynamics study
- DOI 10.1103/PhysRevB.73.184113
- Z. Lin L.V. Zhigilei 2006 Phys. Rev. B 73 184113 10.1103/PhysRevB.73. 184113 2006PhRvB..73r4113L (Pubitemid 43727899)
- (2006) Physical Review B - Condensed Matter and Materials Physics , vol.73 , Issue.18 , pp. 184113
- Lin, Z.¹ Zhigilei, L.V.²

11
- 0036423947
- Laser ablation thresholds of silicon for different pulse durations: Theory and experiment
- DOI 10.1016/S0169-4332(02)00458-0, PII S0169433202004580
- H.O. Jeschke, et al. 2002 Appl. Surf. Sci. 197-198 839 10.1016/S0169-4332(02)00458-0 (Pubitemid 35344664)
- (2002) Applied Surface Science , vol.197-198 , pp. 839-844
- Jeschke, H.O.¹ Garcia, M.E.² Lenzner, M.³ Bonse, J.⁴ Kruger, J.⁵ Kautek, W.⁶

12
- 67349203992
- 10.1007/s00339-009-5178-2 2009ApPhA.96.33J
- H.O. Jeschke, et al. 2009 Appl. Phys. A 96 33 10.1007/s00339-009-5178-2 2009ApPhA..96...33J
- (2009) Appl. Phys. A , vol.96 , pp. 33
- Jeschke, H.O.¹

13
- 41549113851
- X-ray diffuse scattering measurements of nucleation dynamics at femtosecond resolution
- DOI 10.1103/PhysRevLett.100.135502
- A. Lindenberg, et al. 2008 Phys. Rev. Lett. 100 135502 10.1103/PhysRevLett.100.135502 2008PhRvL.100m5502L (Pubitemid 351474038)
- (2008) Physical Review Letters , vol.100 , Issue.13 , pp. 135502
- Lindenberg, A.M.¹ Engemann, S.² Gaffney, K.J.³ Sokolowski-Tinten, K.⁴ Larsson, J.⁵ Hillyard, P.B.⁶ Reis, D.A.⁷ Fritz, D.M.⁸ Arthur, J.⁹ Akre, R.A.¹⁰ George, M.J.¹¹ Deb, A.¹² Bucksbaum, P.H.¹³ Hajdu, J.¹⁴ Meyer, D.A.¹⁵ Nicoul, M.¹⁶ Blome, C.¹⁷ Tschentscher, Th.¹⁸ Cavalieri, A.L.¹⁹ Falcone, R.W.²⁰ more..

15
- 78049344714
- M. Bestehorn, K. Neuffer, Phys. Rev. Lett. 87 (2001)
- (2001) Phys. Rev. Lett. , vol.87
- Bestehorn, M.¹ Neuffer, K.²

16
- 18144413610
- Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures
- DOI 10.1007/s00339-005-3211-7
- W. Kautek, et al. 2005 Appl. Phys. A 81 65 70 10.1007/s00339-005-3211-7 2005ApPhA..81...65K (Pubitemid 40609466)
- (2005) Applied Physics A: Materials Science and Processing , vol.81 , Issue.1 , pp. 65-70
- Kautek, W.¹ Rudolph, P.² Daminelli, G.³ Kruger, J.⁴

17
- 78049339930
- T. Tomita et al., Jpn. J. Appl. Phys. 45 (2006)
- (2006) Jpn. J. Appl. Phys. , vol.45
- Tomita, T.¹

18
- 34648818255
- Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses
- DOI 10.1063/1.2784966
- G. Miyaji K. Miyazaki 2007 Appl. Phys. Lett 91 123102 10.1063/1.2784966 2007ApPhL..91l3102M (Pubitemid 47461935)
- (2007) Applied Physics Letters , vol.91 , Issue.12 , pp. 123102
- Miyaji, G.¹ Miyazaki, K.²

19
- 34250642234
- J. Perrière E. Millon E. Fogarassy (eds). Elsevier Amsterdam Chap. 9
- J. Reif, F. Costache, M. Bestehorn, in Recent Advances in Laser, Processing of Materials, ed. by J. Perrière, E. Millon, E. Fogarassy (Elsevier, Amsterdam, 2006), Chap. 9
- (2006) Recent Advances in Laser, Processing of Materials
- Reif, J.¹ Costache, F.² Bestehorn, M.³

20
- 70349269421
- 10.1002/pssc.200880719 2009PSSCR.6.681R
- J. Reif, et al. 2009 Phys. Status Solidi C 6 681 686 10.1002/pssc. 200880719 2009PSSCR...6..681R
- (2009) Phys. Status Solidi C , vol.6 , pp. 681-686
- Reif, J.¹

21
- 0001089205
- 10.1063/1.369675 1999JAP.85.3301C
- A. Cavalleri, et al. 1999 J. Appl. Phys 85 3301 10.1063/1.369675 1999JAP....85.3301C
- (1999) J. Appl. Phys , vol.85 , pp. 3301
- Cavalleri, A.¹

22
- 0012027653
- Femtosecond laser ablation of silicon-modification thresholds and morphology
- DOI 10.1007/s003390100893
- J. Bonse, et al. 2002 Appl. Phys. A 74 19 25 10.1007/s003390100893 2002ApPhA..74...19B (Pubitemid 41200758)
- (2002) Applied Physics A: Materials Science and Processing , vol.74 , Issue.1 , pp. 19-25
- Bonse, J.¹ Baudach, S.² Kruger, J.³ Kautek, W.⁴ Lenzner, M.⁵

23
- 77949264209
- 10.1007/s00216-009-3342-3
- M. Schade, et al. 2010 Anal. Bioanal. Chem. 396 1905 10.1007/s00216-009- 3342-3
- (2010) Anal. Bioanal. Chem. , vol.396 , pp. 1905
- Schade, M.¹

24
- 84983904718
- 10.1002/pssb.2220830245 1977PSSBR.83.137D
- N.A. Drozdov, et al. 1977 Phys. Status Solidi (b) 83 K127 10.1002/pssb.2220830245 1977PSSBR..83..137D
- (1977) Phys. Status Solidi (B) , vol.83 , pp. 127
- Drozdov, N.A.¹

25
- 33847220775
- 10.1063/1.2423136 2007JAP.101c3519C
- M. Couillard, et al. 2007 J. Appl. Phys. 101 033519 10.1063/1.2423136 2007JAP...101c3519C
- (2007) J. Appl. Phys. , vol.101 , pp. 033519
- Couillard, M.¹

26
- 49449091449
- 10.1007/s00339-008-4632-x 2008ApPhA.92.897C
- F. Costache, et al. 2008 Appl. Phys. A 92 897 10.1007/s00339-008-4632-x 2008ApPhA..92..897C
- (2008) Appl. Phys. A , vol.92 , pp. 897
- Costache, F.¹

27
- 85073191334
- Processing with ultra-short laser pulses
- ed. by P. Schaaf, Springer Ser. Mat. Sci. Springer, Berlin Chap. 6
- J. Reif, Processing with ultra-short laser pulses, in Laser Processing of Materials, ed. by P. Schaaf, Springer Ser. Mat. Sci., vol. 139 (Springer, Berlin, 2010), Chap. 6
- (2010) Laser Processing of Materials , vol.139
- Reif, J.¹

28
- 4344659869
- 10.1007/s00339-004-2805-9 2004ApPhA.79.767R
- B. Rethfeld, et al. 2004 Appl. Phys. A 79 767 769 10.1007/s00339-004- 2805-9 2004ApPhA..79..767R
- (2004) Appl. Phys. A , vol.79 , pp. 767-769
- Rethfeld, B.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.