SCOPUS 정보 검색 플랫폼

Journal of Electroceramics

Volumn 25, Issue 2-4, 2010, Pages 145-149

The annealing effect on properties of ZnO thin film transistors with Ti/Pt source-drain contact

(1) Park, Jin Seong a

a Dankook University (South Korea)

Author keywords

Annealing; Thin film transistor; Ti contact; ZnO

Indexed keywords

ANNEALING; CRYSTALLINITY; DISPLAY DEVICES; II-VI SEMICONDUCTORS; PLATINUM COMPOUNDS; SILICA; THIN FILM CIRCUITS; THIN FILMS; THRESHOLD VOLTAGE; ZINC OXIDE;

ANNEALING EFFECTS; ANNEALING PROCESS; SOURCE-DRAIN CONTACTS; SUB-THRESHOLD SWING(SS); THIN-FILM TRANSISTOR (TFTS); TI CONTACTS; TRANSPARENT DISPLAYS; ZNO ACTIVE LAYERS;

THIN FILM TRANSISTORS;

EID: 78049329517 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-010-9605-8 Document Type: Article

Times cited : (14)

References (20)

1
- 19944421735
- Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO
- DOI 10.1038/nmat1284
- A Tsukazaki A Ohtomo T Onuma M Ohtani T Makino M Sumiya K Ohtani SF Chichibu S Fuke Y Segawa H Ohno H Koinuma M Kawasaki 2005 Nat. Mater. 4 42 1:CAS:528:DC%2BD2MXkvVSm 10.1038/nmat1284 2005NatMa...4...42T 15608644 (Pubitemid 40021000)
- (2005) Nature Materials , vol.4 , Issue.1 , pp. 42-45
- Tsukazaki, A.¹ Ohtomo, A.² Onuma, T.³ Ohtani, M.⁴ Makino, T.⁵ Sumiya, M.⁶ Ohtani, K.⁷ Chichibu, S.F.⁸ Fuke, S.⁹ Segawa, Y.¹⁰ Ohno, H.¹¹ Koinuma, H.¹² Kawasaki, M.¹³

2
- 17444428079
- Dynamic and static photoresponse of ultraviolet-detecting thin-film transistors based on transparent Ni Ox electrodes and an n-ZnO channel
- DOI 10.1063/1.1855390, 076104
- HS Bae CM Choi JH Kim S Im 2005 J. Appl. Phys. 97 076104 10.1063/1.1855390 2005JAP....97g6104B (Pubitemid 40538006)
- (2005) Journal of Applied Physics , vol.97 , Issue.7 , pp. 1-3
- Bae, H.S.¹ Choi, C.M.² Kim, J.H.³ Im, S.⁴

3
- 16244382410
- Fully transparent ZnO thin-film transistor produced at room temperature
- DOI 10.1002/adma.200400368
- EMC Fortunato PMC Barquinha ACMBG Pimentel AMF Goncalves AJS Marques LMN Pereira RFP Martins 2005 Adv. Mater 17 590 1:CAS:528:DC%2BD2MXislOht7Y%3D 10.1002/adma.200400368 (Pubitemid 40448713)
- (2005) Advanced Materials , vol.17 , Issue.5 , pp. 590-594
- Fortunato, E.M.C.¹ Barquinha, P.M.C.² Pimentel, A.C.M.B.G.³ Goncalves, A.M.F.⁴ Marques, A.J.S.⁵ Pereira, L.M.N.⁶ Martins, R.F.P.⁷

4
- 17044363770
- ZnO nanowire field-effect transistor and oxygen sensing property
- DOI 10.1063/1.1836870
- Z Fan D Wang P-C Chang W-Y Tseng JG Lu 2004 Appl. Phys. Lett. 85 5923 1:CAS:528:DC%2BD2cXhtVKqsbfL 10.1063/1.1836870 2004ApPhL..85.5923F (Pubitemid 40817941)
- (2004) Applied Physics Letters , vol.85 , Issue.24 , pp. 5923-5925
- Fan, Z.¹ Wang, D.² Chang, P.-C.³ Tseng, W.-Y.⁴ Lu, J.G.⁵

5
- 7044222794
- 1:CAS:528:DC%2BD2cXnvFekt78%3D 10.1063/1.1794351 2004ApPhL.85.2274H
- YW Heo LC Tien Y Kwon DP Norton SJ Pearton BS Kang F Ren 2004 Appl. Phys. Lett 85 2274 1:CAS:528:DC%2BD2cXnvFekt78%3D 10.1063/1.1794351 2004ApPhL..85.2274H
- (2004) Appl. Phys. Lett , vol.85 , pp. 2274
- Heo, Y.W.¹ Tien, L.C.² Kwon, Y.³ Norton, D.P.⁴ Pearton, S.J.⁵ Kang, B.S.⁶ Ren, F.⁷

6
- 2942609361
- 1:CAS:528:DC%2BD2cXjvVSrtbY%3D 10.1063/1.1712015 2004JAP.95.5813H
- RL Hoffman 2004 J. Appl. Phys. 95 5813 1:CAS:528:DC%2BD2cXjvVSrtbY%3D 10.1063/1.1712015 2004JAP....95.5813H
- (2004) J. Appl. Phys. , vol.95 , pp. 5813
- Hoffman, R.L.¹

7
- 9744265677
- 10.1063/1.1811383 2004ApPhL.85.3702E
- NW Emanetoglu J Zhu Y Chen J Zhong YM Chen YC Lu 2004 Appl. Phys. Lett. 85 3705 10.1063/1.1811383 2004ApPhL..85.3702E
- (2004) Appl. Phys. Lett. , vol.85 , pp. 3705
- Emanetoglu, N.W.¹ Zhu, J.² Chen, Y.³ Zhong, J.⁴ Chen, Y.M.⁵ Lu, Y.C.⁶

8
- 17544378451
- 10.4028/www.scientific.net/SSP.51-52.541
- K Ellmer K Diesner R Wendt S Fiechter 1996 Solid State Phenom. 51 541 10.4028/www.scientific.net/SSP.51-52.541
- (1996) Solid State Phenom. , vol.51 , pp. 541
- Ellmer, K.¹ Diesner, K.² Wendt, R.³ Fiechter, S.⁴

9
- 0037450269
- 1:CAS:528:DC%2BD3sXht1Clt7s%3D 10.1063/1.1553997 2003ApPhL.82.1117C
- PF Carcia RS McLean MH Reilly G Nunes Jr 2003 Appl. Phys. Lett. 82 1117 1:CAS:528:DC%2BD3sXht1Clt7s%3D 10.1063/1.1553997 2003ApPhL..82.1117C
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1117
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Nunes Jr., G.⁴

10
- 0037323096
- 1:CAS:528:DC%2BD3sXhtVKjtrw%3D 10.1063/1.1534627 2003JAP.93.1624M
- S Masuda K Kitamura Y Okumura S Miyatake H Tabata T Kawai 2003 J. Appl. Phys. 93 1624 1:CAS:528:DC%2BD3sXhtVKjtrw%3D 10.1063/1.1534627 2003JAP....93.1624M
- (2003) J. Appl. Phys. , vol.93 , pp. 1624
- Masuda, S.¹ Kitamura, K.² Okumura, Y.³ Miyatake, S.⁴ Tabata, H.⁵ Kawai, T.⁶

11
- 0037415828
- 1:CAS:528:DC%2BD3sXotlSmtQ%3D%3D 10.1063/1.1542677 2003ApPhL.82.733H
- RL Hoffman BJ Norris JF Wager 2003 Appl. Phys. Lett. 82 733 1:CAS:528:DC%2BD3sXotlSmtQ%3D%3D 10.1063/1.1542677 2003ApPhL..82..733H
- (2003) Appl. Phys. Lett. , vol.82 , pp. 733
- Hoffman, R.L.¹ Norris, B.J.² Wager, J.F.³

12
- 3242712315
- 1:CAS:528:DC%2BD2cXls1ahs78%3D 10.1116/1.1756166
- HS Bae S Im 2004 J. Vac. Sci. Tech. B 22 1191 1:CAS:528: DC%2BD2cXls1ahs78%3D 10.1116/1.1756166
- (2004) J. Vac. Sci. Tech. B , vol.22 , pp. 1191
- Bae, H.S.¹ Im, S.²

13
- 33947315446
- The role of oxygen vacancies in epitaxial-deposited ZnO thin films
- DOI 10.1063/1.2437122
- FK Shan GX Liu WJ Lee BC Shin 2007 J. Appl. Phys. 101 053106 10.1063/1.2437122 2007JAP...101e3106S (Pubitemid 46439917)
- (2007) Journal of Applied Physics , vol.101 , Issue.5 , pp. 053106
- Shan, F.K.¹ Liu, G.X.² Lee, W.J.³ Shin, B.C.⁴

14
- 22944444544
- Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition
- DOI 10.1063/1.1940137
- ST Tan BJ Chen XW Sun WJ Fan HS Kwok XH Zhang SJ Chua 2005 J. Appl. Phys 98 013505 10.1063/1.1940137 2005JAP....98a3505T (Pubitemid 41049018)
- (2005) Journal of Applied Physics , vol.98 , Issue.1 , pp. 013505
- Tan, S.T.¹ Chen, B.J.² Sun, X.W.³ Fan, W.J.⁴ Kwok, H.S.⁵ Zhang, X.H.⁶ Chua, S.J.⁷

15
- 25144456909
- Defect dynamics in annealed ZnO by positron annihilation spectroscopy
- DOI 10.1063/1.2035308, 053513
- S Dutta M Chakrabarti S Chattopadhyay D Jana D Sanyal A Sarkar 2005 J. Appl. Phys. 98 053513 10.1063/1.2035308 2005JAP....98e3513D (Pubitemid 41345082)
- (2005) Journal of Applied Physics , vol.98 , Issue.5 , pp. 1-5
- Dutta, S.¹ Chakrabarti, M.² Chattopadhyay, S.³ Jana, D.⁴ Sanyal, D.⁵ Sarkar, A.⁶

16
- 0009752567
- 1:CAS:528:DC%2BD3MXit1aqtLs%3D 10.1149/1.1346617
- HK Kim SH Han TY Seong WK Choi 2001 J. Electrochem. Soc. 148 G114 1:CAS:528:DC%2BD3MXit1aqtLs%3D 10.1149/1.1346617
- (2001) J. Electrochem. Soc. , vol.148 , pp. 114
- Kim, H.K.¹ Han, S.H.² Seong, T.Y.³ Choi, W.K.⁴

17
- 0000273548
- 1:CAS:528:DyaK3MXhtlemtLs%3D 10.1103/PhysRevLett.66.648 1991PhRvL.66.648L 10043863
- DB Laks CG Van de Walle GF Neumark ST Pantelides 1991 Phys. Rev. Lett. 66 648 1:CAS:528:DyaK3MXhtlemtLs%3D 10.1103/PhysRevLett.66.648 1991PhRvL..66..648L 10043863
- (1991) Phys. Rev. Lett. , vol.66 , pp. 648
- Laks, D.B.¹ Van De Walle, C.G.² Neumark, G.F.³ Pantelides, S.T.⁴

18
- 0001649616
- 1:CAS:528:DC%2BD3cXjslWns70%3D 10.1103/PhysRevB.61.15019 2000PhRvB.6115019K
- AF Kohan G Ceder D Morgan 2000 Phys. Rev. B 61 15019 1:CAS:528: DC%2BD3cXjslWns70%3D 10.1103/PhysRevB.61.15019 2000PhRvB..6115019K
- (2000) Phys. Rev. B , vol.61 , pp. 15019
- Kohan, A.F.¹ Ceder, G.² Morgan, D.³

19
- 25144462707
- A comprehensive review of ZnO materials and devices
- DOI 10.1063/1.1992666, 041301
- U Ozgur YI Alivov C Liu A Teke MA Reshchikov S Dogan V Avrutin S-J Cho H Morkoc 2005 J. Appl. Phys. 98 041301 10.1063/1.1992666 2005JAP....98d1301O (Pubitemid 41348664)
- (2005) Journal of Applied Physics , vol.98 , Issue.4 , pp. 1-103
- Ozgur, U.¹ Alivov, Ya.I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Dogan, S.⁶ Avrutin, V.⁷ Cho, S.-J.⁸ Morko, H.⁹

20
- 27844584903
- Ti/Au n-type Ohmic contacts to bulk ZnO substrates
- DOI 10.1063/1.2135381, 212106
- HS Yang DP Norton SJ Pearton F Ren 2005 Appl. Phys. Lett 87 212106 10.1063/1.2135381 2005ApPhL..87u2106Y (Pubitemid 41643363)
- (2005) Applied Physics Letters , vol.87 , Issue.21 , pp. 1-3
- Yang, H.S.¹ Norton, D.P.² Pearton, S.J.³ Ren, F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.