SCOPUS 정보 검색 플랫폼

Volumn 257, Issue 5, 2010, Pages 1729-1735

Differing morphologies of textured diamond films with electrical properties made with microwave plasma chemical vapor deposition

(4) Lai, Wen Chi a Wu, Yu Shiang b Chang, Hou Cheng b Lee, Yuan Haun a

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

b CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

Author keywords

Ohmic contact; Rectangular structure; Tier; 1 1 0 preferred orientation

Indexed keywords

ELECTRIC CONTACTORS; FILM GROWTH; MICROWAVES; OHMIC CONTACTS; PILES; PLASMA CVD;

DIFFERENT STAGES; IV CHARACTERISTICS; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; MORPHOLOGICAL STRUCTURES; ORIENTED DIAMOND FILMS; PREFERRED ORIENTATIONS; RECTANGULAR STRUCTURE; TIER;

DIAMOND FILMS;

EID: 77958578702 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.09.006 Document Type: Article

Times cited : (9)

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