Preparation and characterization of (1 0 0)-textured diamond films obtained by hot-filament CVD

Vacuum

Volumn 79, Issue 1-2, 2005, Pages 84-89

  Zhang, Minglong ^a   Gu, Beibei ^a   Wang, Linjun ^a   Xia, Yiben ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

(1 0 0) Textured diamond film; Hot filament CVD; Raman spectroscopy; Thermally stimulated current

Indexed keywords

COMPOSITION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; SYNTHESIS (CHEMICAL); TEXTURES; X RAY DIFFRACTION ANALYSIS;

(100)-TEXTURED DIAMOND FILMS; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION; THERMALLY STIMULATED CURRENTS;

DIAMOND FILMS;

EID: 20344390062     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.062     Document Type: Article

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