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Volumn 13, Issue 12, 2010, Pages

Effects on annealing temperature for solution-processed IZTO TFTs by nitrogen incorporation

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; ELECTRICAL PROPERTY; FIELD-EFFECT MOBILITIES; NITROGEN INCORPORATION; NITROGEN-DOPED; ON/OFF RATIO; PRECURSOR SOLUTIONS; SOLUTION-PROCESSED; TIN CHLORIDES; ZINC TIN OXIDE;

EID: 77958501520     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3489530     Document Type: Article
Times cited : (18)

References (15)
  • 1
    • 9744248669 scopus 로고    scopus 로고
    • Roomerature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London) NATUAS 0028-0836, 432, 488 (2004). 10.1038/nature03090 (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 2
    • 33745435681 scopus 로고    scopus 로고
    • Ionic amorphous oxide semiconductors: Material design, carrier transport, and device application
    • DOI 10.1016/j.jnoncrysol.2006.01.073, PII S0022309306002936
    • H. Hosono, J. Non-Cryst. Solids JNCSBJ 0022-3093, 352, 851 (2006). 10.1016/j.jnoncrysol.2006.01.073 (Pubitemid 43949008)
    • (2006) Journal of Non-Crystalline Solids , vol.352 , Issue.SPEC. ISS. , pp. 851-858
    • Hosono, H.1
  • 3
    • 34250621864 scopus 로고    scopus 로고
    • A general route to printable high-mobility transparent amorphous oxide semiconductors
    • DOI 10.1002/adma.200600961
    • D.-H. Lee, Y.-J. Chang, G. S. Herman, and C.-H. Chang, Adv. Mater. ADVMEW 0935-9648, 19, 843 (2007). 10.1002/adma.200600961 (Pubitemid 46932815)
    • (2007) Advanced Materials , vol.19 , Issue.6 , pp. 843-847
    • Lee, D.-H.1    Chang, Y.-J.2    Herman, G.S.3    Chang, C.-H.4
  • 6
    • 63649106046 scopus 로고    scopus 로고
    • JPAPBE 0022-3727,. 10.1088/0022-3727/42/3/035106
    • S.-J. Seo, C. G. Choi, Y. H. Hwang, and B.-S. Bae, J. Phys. D JPAPBE 0022-3727, 42, 035106 (2009). 10.1088/0022-3727/42/3/035106
    • (2009) J. Phys. D , vol.42 , pp. 035106
    • Seo, S.-J.1    Choi, C.G.2    Hwang, Y.H.3    Bae, B.-S.4
  • 8
    • 35649020699 scopus 로고    scopus 로고
    • High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO
    • DOI 10.1063/1.2803219
    • S. J. Lim, S. Kwon, J.-S. Park, and H. Kim, Appl. Phys. Lett. APPLAB 0003-6951, 91, 183517 (2007). 10.1063/1.2803219 (Pubitemid 350037253)
    • (2007) Applied Physics Letters , vol.91 , Issue.18 , pp. 183517
    • Lim, S.J.1    Kwon, S.-J.2    Kim, H.3    Park, J.-S.4
  • 13
    • 0037136179 scopus 로고    scopus 로고
    • Plasma-enhanced chemical vapor deposition of silicon nitride below 250°C
    • DOI 10.1016/S0042-207X(02)00134-3, PII S0042207X02001343
    • Y. Kuo and H. H. Lee, Vacuum VACUAV 0042-207X, 66, 299 (2002). 10.1016/S0042-207X(02)00134-3 (Pubitemid 34862423)
    • (2002) Vacuum , vol.66 , Issue.3-4 , pp. 299-303
    • Kuo, Y.1    Lee, H.H.2
  • 14
    • 84870414017 scopus 로고    scopus 로고
    • last accessed August 2010
    • NIST chemistry web book, http://webbook.nist.gov/chemistry/, last accessed August 2010.
    • NIST Chemistry Web Book
  • 15
    • 0034312902 scopus 로고    scopus 로고
    • x sensitivity of oxide thin films prepared by RF sputtering
    • DOI 10.1016/S0025-5408(00)00455-4, PII S0025540800004554
    • S. Tanaka and T. Esaka, Bull. Mater. Sci. BUMSDW 0250-4707, 35, 2491 (2000). 10.1016/S0025-5408(00)00455-4 (Pubitemid 32272228)
    • (2000) Materials Research Bulletin , vol.35 , Issue.14-15 , pp. 2491-2502
    • Tanaka, S.1    Esaka, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.