Fabrication of micro-structures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7762, Issue , 2010, Pages

  Chen, Qiuping ^a   Chen, Qiuling ^a   MacCioni, Gabriele ^a,b   Ferrero, Sergio ^a,b   Scaltrito, Luciano ^a,b   Sacco, Adriano ^a,b  

^a POLITECNICO DI TORINO   (Italy)

^b Microla Optoelectronics   (Italy)

Author keywords

Direct Imprinting Process; Lab on chip; Laser Ablation; Ni alloy master

Indexed keywords

GLASS SUBSTRATES; IMPRINTING PROCESS; LAB-ON-CHIP; LASER ABLATION TECHNIQUE; LASER FREQUENCY; LASER PROCESSING; LITHOGRAPHY-BASED TECHNOLOGIES; MICRO-PROFILOMETER; NI ALLOYS; NOVEL TECHNIQUES; PROCESS PARAMETERS; Q-SWITCHED; VACUUM CONDITION;

DEBRIS; LABORATORIES; LASER ABLATION; LASER APPLICATIONS; MICROMANIPULATORS; NICKEL ALLOYS; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THREE DIMENSIONAL;

ALLOYS;

EID: 77958180886     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.859992     Document Type: Conference Paper

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