Microdrilling and micromachining with diode-pumped solid-state lasers

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1335-1339

  Otani, T ^a   Herbst, L ^a   Heglin, M ^b   Govorkov, S V ^b   Wiessner, A O ^b  

^a Lambda Physik GmbH   (Germany)

^b Lambda Physik USA Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DIAMONDS; HEAT AFFECTED ZONE; LASER PULSES; LIGHT; MICROELECTRONICS; SEMICONDUCTOR LASERS; SILICON; SURFACE STRUCTURE; TELESCOPES; TRANSMISSION ELECTRON MICROSCOPY;

LASER SOURCES; THERMAL DAMAGES; TREPANNING; WAVELENGTHS;

MICROMACHINING;

EID: 4344612031     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2766-z     Document Type: Conference Paper

References (6)

1. S.V. Govorkov, E.V. Slobodtchikov, A.O. Wiessner, D: Basting: Proc. SPIE 3933, 365 (2000)
2. S.V. Govorkov, E.V. Slobodchikov, A.O. Wiessner, D. Basting: Proc. SPIE 4065, 790 (2000)
3. T. Abeln, J. Radtke, F. Dausinger: Proc. ICALEO'99 (Fl. Laser Institute of America, Orlando, Florida 1999) pp. 195-203
4. F. Lichtner, F. Dausinger: Laser Mag. 6, 24 (2002)
5. A. Ostendorf, K. Koerber, T. Nether, T. Temme: "Material Processing Applications for Diode Pumped Solid State Lasers" In: Lambda Highlights, No. 57 (Lambda Physik, Göttingen 2000) pp. 1-2
6. L. Mayor: Laser Mag. 1, 8 (2003)