Interpretation of macropore shape transformation in crystalline silicon upon high temperature processing

Journal of Applied Physics

Volumn 108, Issue 7, 2010, Pages

  Ghannam, Moustafa Y ^a   Alomar, Abdulazeez S ^a   Poortmans, Jef ^b   Mertens, Robert P ^b  

^a KUWAIT UNIVERSITY   (Kuwait)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT GAS; CAVITY COLLAPSE; CAVITY GROWTH; CAVITY SURFACES; CONSTANT VOLUMES; CRITICAL CONDITION; CRYSTALLINE FILMS; CRYSTALLINE SILICONS; CYLINDRICAL PORES; ELASTIC ENERGY; EXPERIMENTAL OBSERVATION; GRIFFITH FRACTURE CRITERION; HIGH PARTIAL PRESSURE; HIGH TEMPERATURE TREATMENTS; HIGH-TEMPERATURE PROCESSING; MACROPORES; OBLATE SHAPE; PHYSICAL INTERPRETATION; SHAPE TRANSFORMATION; SPHERICAL SYMMETRY; ULTRA-THIN;

CRYSTALLINE MATERIALS; DIFFUSION IN SOLIDS; SURFACE CHEMISTRY; SURFACE DIFFUSION;

SURFACE REACTIONS;

EID: 77958162692     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3462448     Document Type: Article

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