SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 6, 2007, Pages 1903-1908

Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FREE ENERGY; HYDROPHOBICITY; OPTIMIZATION; PASSIVATION; PLASMAS; PROTECTIVE COATINGS; REACTION KINETICS;

FLUOROCARBON COATINGS; HYDROPHOBIC FLUOROCARBON FILMS; POLYMER STRUCTURES; SURFACE FREE ENERGY;

FLUOROCARBONS;

EID: 37149022569 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2806960 Document Type: Article

Times cited : (31)

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