New methods of analyzing indentation experiments on very thin films

Journal of Materials Research

Volumn 25, Issue 4, 2010, Pages 728-734

  Li, Han ^a   Randall, Nicholas X ^b   Vlassak, Joost J ^a  

^a HARVARD UNIVERSITY   (United States)

^b CSM Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC INDENTATION; ELASTIC MISMATCH; ELASTIC SUBSTRATE; ELASTO-PLASTIC; INDENTATION EXPERIMENT; MATERIAL PILEUP; RIGOROUS SOLUTION; VERY THIN FILMS;

THIN FILMS; VAPOR DEPOSITION;

INDENTATION;

EID: 77957945352     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2010.0095     Document Type: Article

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