Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2010, Pages 1250-1253

  Peng, Zhen ^a   Molinero, David ^a   Palego, Cristiano ^a   Hwang, James C M ^a   Moody, Cody ^b   Malczewski, Andrew ^b   Pillans, Brandon W ^b  

^a LEHIGH UNIVERSITY   (United States)

^b RAYTHEON COMPANY   (United States)

Author keywords

Charge injection; Conductivity; Dielectric films; Dielectric materials; Humidity; Humidity sensor; Microelectromechanical devices; Microwave devices; Switches

Indexed keywords

AMBIENT HUMIDITY; CONDUCTIVITY; DIELECTRIC CHARGING; ENHANCED SURFACE; HUMIDITY; MICRO-ELECTRO-MECHANICAL; RF MEMS CAPACITIVE SWITCHES; SURFACE CHARGING; SURFACE CONDUCTION; SURFACE CONDUCTIVITY;

DIELECTRIC DEVICES; DIELECTRIC FILMS; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS; HUMIDITY SENSORS; MICROELECTROMECHANICAL DEVICES; MICROWAVE DEVICES; MICROWAVES; SURFACE CHEMISTRY; SURFACES;

MICROWAVE SENSORS;

EID: 77957772073     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2010.5515661     Document Type: Conference Paper

References (9)

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