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Volumn 157, Issue 11, 2010, Pages

Molecular interaction radii and rate constants for clarifying organic compound physisorption on silicon surface

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION RATE CONSTANTS; IN-SITU MEASUREMENT; ISOPROPYL ALCOHOLS; MULTI-COMPONENT SYSTEMS; ORGANIC CONTAMINATION; SILICON SURFACES; STEADY STATE; SURFACE CONCENTRATION; THREE-COMPONENT SYSTEM;

EID: 77957720326     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3489364     Document Type: Article
Times cited : (11)

References (23)
  • 6
    • 77957720744 scopus 로고    scopus 로고
    • ANCEAD 0044-8249,. 10.1002/ange.200800737
    • R. Yerushalmi, J. C. Ho, Z. Fan, and A. Javey, Angew. Chem. ANCEAD 0044-8249, 120, 4512 (2008). 10.1002/ange.200800737
    • (2008) Angew. Chem. , vol.120 , pp. 4512
    • Yerushalmi, R.1    Ho, J.C.2    Fan, Z.3    Javey, A.4
  • 7
    • 33644764058 scopus 로고    scopus 로고
    • Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface
    • DOI 10.1021/ie050754s
    • Y. Kang, W. Den, and H. Bai, Ind. Eng. Chem. Res. IECRED 0888-5885, 45, 1331 (2006). 10.1021/ie050754s (Pubitemid 43342589)
    • (2006) Industrial and Engineering Chemistry Research , vol.45 , Issue.4 , pp. 1331-1336
    • Kang, Y.1    Den, W.2    Bai, H.3
  • 8
    • 22544447806 scopus 로고    scopus 로고
    • Analysis of organic contamination adsorbed on a silicon surface in a vacuum chamber in electron beam lithography
    • DOI 10.1149/1.1914756
    • K. Saga and T. Hattori, J. Electrochem. Soc. JESOAN 0013-4651, 152, G494 (2005). 10.1149/1.1914756 (Pubitemid 41013515)
    • (2005) Journal of the Electrochemical Society , vol.152 , Issue.6
    • Saga, K.1    Hattori, T.2
  • 12
    • 0000790929 scopus 로고    scopus 로고
    • Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface
    • DOI 10.1149/1.1373660
    • H. Habuka, M. Shimada, and K. Okuyama, J. Electrochem. Soc. JESOAN 0013-4651, 148, G365 (2001). 10.1149/1.1373660 (Pubitemid 33694815)
    • (2001) Journal of the Electrochemical Society , vol.148 , Issue.7
    • Habuka, H.1    Shimada, M.2    Okuyama, K.3
  • 20
  • 21
    • 35548968920 scopus 로고    scopus 로고
    • Physisorption and desorption of diethyl phthalate and isopropanol on a silicon surface
    • DOI 10.1149/1.2794283
    • H. Habuka and D. Yamaya, J. Electrochem. Soc. JESOAN 0013-4651, 154, H1031 (2007). 10.1149/1.2794283 (Pubitemid 350017638)
    • (2007) Journal of the Electrochemical Society , vol.154 , Issue.12
    • Habuka, H.1    Yamaya, D.2
  • 23
    • 45249090676 scopus 로고
    • (in Japanese), 4th ed., Iwanami, Tokyo
    • Nihon Kagaku Kai, Kagakubinran (in Japanese), 4th ed., Iwanami, Tokyo (1993).
    • (1993) Kagakubinran
    • Kagaku Kai, N.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.