-
1
-
-
0032154614
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.37.4649
-
S. De Gendt, D. M. Knotter, K. Kenis, M. Depas, M. Meuris, P. W. Mertens, and M. M. Heyns, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 37, 4649 (1998). 10.1143/JJAP.37.4649
-
(1998)
Jpn. J. Appl. Phys., Part 1
, vol.37
, pp. 4649
-
-
De Gendt, S.1
Knotter, D.M.2
Kenis, K.3
Depas, M.4
Meuris, M.5
Mertens, P.W.6
Heyns, M.M.7
-
2
-
-
0033726265
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.39.2497
-
F. Sugimoto, S. Okamura, T. Inokuma, Y. Kurata, and S. Hasegawa, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 39, 2497 (2000). 10.1143/JJAP.39.2497
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, pp. 2497
-
-
Sugimoto, F.1
Okamura, S.2
Inokuma, T.3
Kurata, Y.4
Hasegawa, S.5
-
3
-
-
0034215920
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.39.3947
-
J. J. Guan, G. W. Gale, and J. Bennett, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 39, 3947 (2000). 10.1143/JJAP.39.3947
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, pp. 3947
-
-
Guan, J.J.1
Gale, G.W.2
Bennett, J.3
-
4
-
-
35548947194
-
-
The Japan Air Cleaning Association
-
T. Takatsuka, M. Godo, and K. Miura, in Proceedings of 25th Annual Technical Meeting on Air Cleaning and Contamination Control, The Japan Air Cleaning Association, p. 4, (2007).
-
(2007)
Proceedings of 25th Annual Technical Meeting on Air Cleaning and Contamination Control
, pp. 4
-
-
Takatsuka, T.1
Godo, M.2
Miura, K.3
-
5
-
-
67651054264
-
-
1468-7941
-
S. N. Li, H. Y. Shih, S. Y. Yen, and J. Yang, Aerosol Air Qual. Res., 7, 432 (2007). 1468-7941
-
(2007)
Aerosol Air Qual. Res.
, vol.7
, pp. 432
-
-
Li, S.N.1
Shih, H.Y.2
Yen, S.Y.3
Yang, J.4
-
6
-
-
77957720744
-
-
ANCEAD 0044-8249,. 10.1002/ange.200800737
-
R. Yerushalmi, J. C. Ho, Z. Fan, and A. Javey, Angew. Chem. ANCEAD 0044-8249, 120, 4512 (2008). 10.1002/ange.200800737
-
(2008)
Angew. Chem.
, vol.120
, pp. 4512
-
-
Yerushalmi, R.1
Ho, J.C.2
Fan, Z.3
Javey, A.4
-
7
-
-
33644764058
-
Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface
-
DOI 10.1021/ie050754s
-
Y. Kang, W. Den, and H. Bai, Ind. Eng. Chem. Res. IECRED 0888-5885, 45, 1331 (2006). 10.1021/ie050754s (Pubitemid 43342589)
-
(2006)
Industrial and Engineering Chemistry Research
, vol.45
, Issue.4
, pp. 1331-1336
-
-
Kang, Y.1
Den, W.2
Bai, H.3
-
8
-
-
22544447806
-
Analysis of organic contamination adsorbed on a silicon surface in a vacuum chamber in electron beam lithography
-
DOI 10.1149/1.1914756
-
K. Saga and T. Hattori, J. Electrochem. Soc. JESOAN 0013-4651, 152, G494 (2005). 10.1149/1.1914756 (Pubitemid 41013515)
-
(2005)
Journal of the Electrochemical Society
, vol.152
, Issue.6
-
-
Saga, K.1
Hattori, T.2
-
9
-
-
43049116525
-
Effects of organic contaminants during metal oxide semiconductor processes
-
DOI 10.1149/1.2904453
-
K. S. Kim, J. Y. Kim, H. B. Kang, B. Y. Lee, and S. M. Park, J. Electrochem. Soc. JESOAN 0013-4651, 155, H426 (2008). 10.1149/1.2904453 (Pubitemid 351623473)
-
(2008)
Journal of the Electrochemical Society
, vol.155
, Issue.6
-
-
Kim, K.-S.1
Kim, J.-Y.2
Kang, H.-B.3
Lee, B.-Y.4
Park, S.-M.5
-
11
-
-
0034206015
-
-
JESOAN 0013-4651,. 10.1149/1.1393527
-
H. Habuka, M. Shimada, and K. Okuyama, J. Electrochem. Soc. JESOAN 0013-4651, 147, 2319 (2000). 10.1149/1.1393527
-
(2000)
J. Electrochem. Soc.
, vol.147
, pp. 2319
-
-
Habuka, H.1
Shimada, M.2
Okuyama, K.3
-
12
-
-
0000790929
-
Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface
-
DOI 10.1149/1.1373660
-
H. Habuka, M. Shimada, and K. Okuyama, J. Electrochem. Soc. JESOAN 0013-4651, 148, G365 (2001). 10.1149/1.1373660 (Pubitemid 33694815)
-
(2001)
Journal of the Electrochemical Society
, vol.148
, Issue.7
-
-
Habuka, H.1
Shimada, M.2
Okuyama, K.3
-
13
-
-
4644235890
-
-
M. Shimada, K. Okuyama, S. Honda, and H. Habuka, Kuukiseijo, 40, 24 (2002).
-
(2002)
Kuukiseijo
, vol.40
, pp. 24
-
-
Shimada, M.1
Okuyama, K.2
Honda, S.3
Habuka, H.4
-
16
-
-
3142708062
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.43.2661
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 43, 2661 (2004). 10.1143/JJAP.43.2661
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 2661
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
17
-
-
4644265979
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.43.4135
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 43, 4135 (2004). 10.1143/JJAP.43.4135
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 4135
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
18
-
-
6344261952
-
-
JAPNDE 0021-4922,. 10.1143/JJAP.43.5496
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922, 43, 5496 (2004). 10.1143/JJAP.43.5496
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 5496
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
19
-
-
18344371373
-
Quartz crystal microbalance for silicon surface organic contamination
-
DOI 10.1149/1.1864472
-
H. Habuka, K. Suzuki, S. Okamura, M. Shimada, and K. Okuyama, J. Electrochem. Soc. JESOAN 0013-4651, 152, G241 (2005). 10.1149/1.1864472 (Pubitemid 40636232)
-
(2005)
Journal of the Electrochemical Society
, vol.152
, Issue.4
-
-
Habuka, H.1
Suzuki, K.2
Okamura, S.3
Shimada, M.4
Okuyama, K.5
-
20
-
-
27944435818
-
Gas velocity influence on silicon surface organic contamination evaluated using quartz crystal microbalance
-
DOI 10.1149/1.2051869
-
H. Habuka, M. Tawada, T. Takeuchi, and M. Aihara, J. Electrochem. Soc. JESOAN 0013-4651, 152, G862 (2005). 10.1149/1.2051869 (Pubitemid 41680889)
-
(2005)
Journal of the Electrochemical Society
, vol.152
, Issue.11
-
-
Habuka, H.1
Tawada, M.2
Takeuchi, T.3
Aihara, M.4
-
21
-
-
35548968920
-
Physisorption and desorption of diethyl phthalate and isopropanol on a silicon surface
-
DOI 10.1149/1.2794283
-
H. Habuka and D. Yamaya, J. Electrochem. Soc. JESOAN 0013-4651, 154, H1031 (2007). 10.1149/1.2794283 (Pubitemid 350017638)
-
(2007)
Journal of the Electrochemical Society
, vol.154
, Issue.12
-
-
Habuka, H.1
Yamaya, D.2
-
22
-
-
0442306834
-
-
The Japan Air Cleaning Association
-
Y. Sakamoto, K. Takeda, T. Nonaka, T. Taira, T. Fujimoto, N. Suwa, and K. Otsuka, in Proceedings of 18th Annual Technical Meeting on Air Cleaning and Contamination Control, The Japan Air Cleaning Association, p. 15 (2000).
-
(2000)
Proceedings of 18th Annual Technical Meeting on Air Cleaning and Contamination Control
, pp. 15
-
-
Sakamoto, Y.1
Takeda, K.2
Nonaka, T.3
Taira, T.4
Fujimoto, T.5
Suwa, N.6
Otsuka, K.7
-
23
-
-
45249090676
-
-
(in Japanese), 4th ed., Iwanami, Tokyo
-
Nihon Kagaku Kai, Kagakubinran (in Japanese), 4th ed., Iwanami, Tokyo (1993).
-
(1993)
Kagakubinran
-
-
Kagaku Kai, N.1
|