Gas velocity influence on silicon surface organic contamination evaluated using quartz crystal microbalance

Journal of the Electrochemical Society

Volumn 152, Issue 11, 2005, Pages

  Habuka, Hitoshi ^a,b   Tawada, Masaki ^a   Takeuchi, Takashi ^a   Aihara, Masahiko ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^b ELECTROCHEMICAL SOCIETY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROBALANCE; DIETHYL PHTHALATE; GAS VELOCITY; SURFACE ORGANIC CONTAMINATION;

ADSORPTION; CONTAMINATION; CRYSTAL STRUCTURE; DESORPTION; NITROGEN; SILICON; WATER;

SURFACE PHENOMENA;

EID: 27944435818     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2051869     Document Type: Article

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