-
1
-
-
0032154614
-
-
S. D. Gendt, D. M. Knotter, K. Kenis, M. Depas, M. Meuris, P. W. Mertens, and M. M. Heyns, Jpn. J. Appl. Phys., Part 1, 37, 4649 (1998).
-
(1998)
Jpn. J. Appl. Phys., Part 1
, vol.37
, pp. 4649
-
-
Gendt, S.D.1
Knotter, D.M.2
Kenis, K.3
Depas, M.4
Meuris, M.5
Mertens, P.W.6
Heyns, M.M.7
-
2
-
-
0033726265
-
-
F. Sugimoto, S. Okamura, T. Inokuma, Y. Kurata, and S. Hasegawa, Jpn. J. Appl. Phys., Part 1, 39, 2497 (2000).
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, pp. 2497
-
-
Sugimoto, F.1
Okamura, S.2
Inokuma, T.3
Kurata, Y.4
Hasegawa, S.5
-
3
-
-
0034215920
-
-
J. J. Guan, G. W. Gale, and J. Bennett, Jpn. J. Appl. Phys., Part 1, 39, 3947 (2000).
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, pp. 3947
-
-
Guan, J.J.1
Gale, G.W.2
Bennett, J.3
-
4
-
-
84858345593
-
-
Tables 69a and 69b at http://www.itrs.net/Links/2006Update/FinalToPost/ 07_FEP2006Update.pdf
-
-
-
-
6
-
-
0034206015
-
-
H. Habuka, M. Shimada, and K. Okuyama, J. Electrochem. Soc., 147, 2319 (2000).
-
(2000)
J. Electrochem. Soc.
, vol.147
, pp. 2319
-
-
Habuka, H.1
Shimada, M.2
Okuyama, K.3
-
7
-
-
0000790929
-
-
H. Habuka, M. Shimada, and K. Okuyama, J. Electrochem. Soc., 148, G365 (2001).
-
(2001)
J. Electrochem. Soc.
, vol.148
, pp. 365
-
-
Habuka, H.1
Shimada, M.2
Okuyama, K.3
-
8
-
-
4644235890
-
-
M. Shimada, K. Okuyama, S. Honda, and H. Habuka, Kuukiseijo, 40, 24 (2002).
-
(2002)
Kuukiseijo
, vol.40
, pp. 24
-
-
Shimada, M.1
Okuyama, K.2
Honda, S.3
Habuka, H.4
-
11
-
-
3142708062
-
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1, 43, 2661 (2004).
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 2661
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
12
-
-
4644265979
-
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1, 43, 4135 (2004).
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 4135
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
13
-
-
6344261952
-
-
S. Okamura, M. Shimada, and K. Okuyama, Jpn. J. Appl. Phys., Part 1, 43, 5496 (2004).
-
(2004)
Jpn. J. Appl. Phys., Part 1
, vol.43
, pp. 5496
-
-
Okamura, S.1
Shimada, M.2
Okuyama, K.3
-
14
-
-
18344371373
-
-
H. Habuka, K. Suzuki, S. Okamura, M. Shimada, and K. Okuyama, J. Electrochem. Soc., 152, G241 (2005).
-
(2005)
J. Electrochem. Soc.
, vol.152
, pp. 241
-
-
Habuka, H.1
Suzuki, K.2
Okamura, S.3
Shimada, M.4
Okuyama, K.5
-
15
-
-
27944435818
-
-
H. Habuka, M. Tawada, T. Takeuchi, and M. Aihara, J. Electrochem. Soc., 152, G862 (2005).
-
(2005)
J. Electrochem. Soc.
, vol.152
, pp. 862
-
-
Habuka, H.1
Tawada, M.2
Takeuchi, T.3
Aihara, M.4
-
17
-
-
84858356098
-
-
http://www.jaish.gr.jp/anzen/gmsds/0916.html
-
-
-
-
18
-
-
0442306834
-
-
Tokyo
-
Y. Sakamoto, K. Takeda, T. Nonaka, T. Taira, T. Fujimoto, N. Suwa, and K. Otsuka, in Proceedings of 18th Annual Technical Meeting on Air Cleaning and Contamination Control, p. 15, Tokyo, (2000).
-
(2000)
Proceedings of 18th Annual Technical Meeting on Air Cleaning and Contamination Control
, pp. 15
-
-
Sakamoto, Y.1
Takeda, K.2
Nonaka, T.3
Taira, T.4
Fujimoto, T.5
Suwa, N.6
Otsuka, K.7
-
19
-
-
0003419557
-
-
4 th ed., Iwanami, Tokyo
-
Nihon Kagaku Kai, Kagakubinran, 4 th ed., Iwanami, Tokyo (1993) (in Japanese).
-
(1993)
Kagakubinran
-
-
Nihon Kagaku, K.1
-
20
-
-
30644475716
-
-
D. Den, H. Bai, and Y. Kang, J. Electrochem. Soc., 153, G149 (2006).
-
(2006)
J. Electrochem. Soc.
, vol.153
, pp. 149
-
-
Den, D.1
Bai, H.2
Kang, Y.3
|