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Thin Solid Films

Volumn 519, Issue 1, 2010, Pages 521-526

Characterization of boron-doped diamond-like carbon prepared by radio frequency sputtering

(4) Pu, Jui Chen a Wang, Sea Fue a Lin, Chia Lun a Sung, James C b

a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY (Taiwan)

b KINIK Company (Taiwan)

Author keywords

Boron doping; Diamond like carbon; Hall effect measurements; Infrared Raman spectroscopy; Sputtering

Indexed keywords

BORON ATOM; BORON CONTENT; BORON-DOPED DIAMOND-LIKE CARBONS; BORON-DOPING; CARBON ATOMS; DEPOSITION PROCESS; DIAMOND-LIKE CARBON; DLC FILM; ELECTRICAL RESISTIVITY; HALL EFFECT MEASUREMENT; INFRARED RAMAN SPECTROSCOPY; N-TYPE CONDUCTION; P-TYPE CONDUCTION; POST ANNEALING; RADIO FREQUENCY MAGNETRON SPUTTERING METHOD; RADIO FREQUENCY SPUTTERING; RAMAN SPECTRA; SEMICONDUCTOR BEHAVIOR; SPUTTERING TARGET; THERMALLY ACTIVATED; XPS;

ATOMIC SPECTROSCOPY; BORON; CARBON FILMS; CARRIER CONCENTRATION; DIAMONDS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; FILM PREPARATION; GRAPHITE; RADIO; RADIO WAVES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 77957695989 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.07.018 Document Type: Article

Times cited : (42)

References (33)

1
- 0033337974
- A. Grill Thin Solid Films 355-356 1999 189
- (1999) Thin Solid Films , vol.355-356 , pp. 189
- Grill, A.¹

2
- 0011225049
- J. Asmussen, D.K. Reinhard, Marcel Dekker New York
- J. Asmussen, D.K. Reinhard, Diamond Films Handbook 2002 Marcel Dekker New York
- (2002) Diamond Films Handbook

3
- 0000256848
- J. Robertson Curr. Opin. Solid State Mater. Sci. 1 1996 557
- (1996) Curr. Opin. Solid State Mater. Sci. , vol.1 , pp. 557
- Robertson, J.¹

4
- 0142122642
- R.G. Compton, J.S. Foord, and F. Marken Electroanalysis 15 2003 1349
- (2003) Electroanalysis , vol.15 , pp. 1349
- Compton, R.G.¹ Foord, J.S.² Marken, F.³

5
- 33646519424
- A.F. Azevedo, R.C. Mendes de Barros, S.H.P. Serrano, and N.G. Ferreira Surf. Coat. Technol. 200 2006 5973
- (2006) Surf. Coat. Technol. , vol.200 , pp. 5973
- Azevedo, A.F.¹ Mendes De Barros, R.C.² Serrano, S.H.P.³ Ferreira, N.G.⁴

6
- 33751233533
- M. Nesladek, J.J. Mares, D. Tromson, C. Mera, P. Bergonzo, P. Hubik, and J. Kristofik Sci. Technol. Adv. Mater. 7 2006 S41
- (2006) Sci. Technol. Adv. Mater. , vol.7 , pp. 41
- Nesladek, M.¹ Mares, J.J.² Tromson, D.³ Mera, C.⁴ Bergonzo, P.⁵ Hubik, P.⁶ Kristofik, J.⁷

7
- 0012693920
- C.H. Lee, and K.S. Lim Appl. Phys. Lett. 72 1998 106
- (1998) Appl. Phys. Lett. , vol.72 , pp. 106
- Lee, C.H.¹ Lim, K.S.²

8
- 22644450983
- S.R.P. Silva, G.A.J. Amaratunga, and K. Okano J. Vac. Sci. Technol. B 17 1999 557
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 557
- Silva, S.R.P.¹ Amaratunga, G.A.J.² Okano, K.³

9
- 0035503288
- C.L. Tsai, C.F. Chen, and C.L. Lin J. Appl. Phys. 90 2001 4847
- (2001) J. Appl. Phys. , vol.90 , pp. 4847
- Tsai, C.L.¹ Chen, C.F.² Lin, C.L.³

10
- 33845516284
- Y.L. Zhou, R.H. Tian, and J.F. Zhi Biosens. Bioelectron. 22 2007 822
- (2007) Biosens. Bioelectron. , vol.22 , pp. 822
- Zhou, Y.L.¹ Tian, R.H.² Zhi, J.F.³

11
- 0000215496
- C.M. Lin, S.J. Chang, M. Yokoyama, F.Y. Chuang, C.H. Tsai, W.C. Wang, and I.-N. Lin Jpn. J. Appl. Phys. 1 38 1999 890
- (1999) Jpn. J. Appl. Phys. 1 , vol.38 , pp. 890
- Lin, C.M.¹ Chang, S.J.² Yokoyama, M.³ Chuang, F.Y.⁴ Tsai, C.H.⁵ Wang, W.C.⁶ Lin, I.-N.⁷

12
- 0001048603
- H. Kinoshita, T. Hando, and M. Yoshida J. Appl. Phys. 89 2001 2737
- (2001) J. Appl. Phys. , vol.89 , pp. 2737
- Kinoshita, H.¹ Hando, T.² Yoshida, M.³

13
- 27744562680
- M. Umeno, and S. Adhikary Diamond Relat. Mater. 14 2005 1973
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1973
- Umeno, M.¹ Adhikary, S.²

14
- 0001477915
- J.V. Anguita, S.R.P. Silva, A.P. Burden, and B.J. Sealy J. Appl. Phys. 86 1999 6276
- (1999) J. Appl. Phys. , vol.86 , pp. 6276
- Anguita, J.V.¹ Silva, S.R.P.² Burden, A.P.³ Sealy, B.J.⁴

15
- 0037165927
- J. Robertson Mater. Sci. Eng. R 37 2002 129
- (2002) Mater. Sci. Eng. R , vol.37 , pp. 129
- Robertson, J.¹

16
- 0036713961
- A. Zeng, E. Liu, S.N. Tan, S. Zhang, and J. Gao Electroanalysis 14 2002 1110
- (2002) Electroanalysis , vol.14 , pp. 1110
- Zeng, A.¹ Liu, E.² Tan, S.N.³ Zhang, S.⁴ Gao, J.⁵

17
- 34147118073
- M. Benabdesselam, P. Iacconi, F. Wrobel, A. Petitfils, and J.E. Butler Diamond Relat. Mater. 16 2007 805
- (2007) Diamond Relat. Mater. , vol.16 , pp. 805
- Benabdesselam, M.¹ Iacconi, P.² Wrobel, F.³ Petitfils, A.⁴ Butler, J.E.⁵

18
- 2042482953
- T.K. Ku, S.H. Chert, C.D. Yang, N.J. She, F.G. Tarntair, C.C. Wang, C.F. Chen, I.J. Hsieh, and H.C. Chang Thin Solid Films 290-291 1996 176
- (1996) Thin Solid Films , vol.290-291 , pp. 176
- Ku, T.K.¹ Chert, S.H.² Yang, C.D.³ She, N.J.⁴ Tarntair, F.G.⁵ Wang, C.C.⁶ Chen, C.F.⁷ Hsieh, I.J.⁸ Chang, H.C.⁹

19
- 38149017835
- P.W. May, W.J. Ludlow, M. Hannaway, P.J. Heard, J.A. Smith, and K.N. Rosser Diamond Relat. Mater. 17 2008 105
- (2008) Diamond Relat. Mater. , vol.17 , pp. 105
- May, P.W.¹ Ludlow, W.J.² Hannaway, M.³ Heard, P.J.⁴ Smith, J.A.⁵ Rosser, K.N.⁶

20
- 0038529378
- Y. Hayashi, S. Ishikawa, T. Soga, M. Umeno, and T. Jimbo Diamond Relat. Mater. 12 2003 687
- (2003) Diamond Relat. Mater. , vol.12 , pp. 687
- Hayashi, Y.¹ Ishikawa, S.² Soga, T.³ Umeno, M.⁴ Jimbo, T.⁵

21
- 0032375163
- W.C.W. Chan, F. Gaspari, T. Allen, P.K. Lim, E. Moreno, E. Sagnes, D. Manage, J. Szurmak, and S. Zukotynski J. Vac. Sci. Technol. A 16 1998 889
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 889
- Chan, W.C.W.¹ Gaspari, F.² Allen, T.³ Lim, P.K.⁴ Moreno, E.⁵ Sagnes, E.⁶ Manage, D.⁷ Szurmak, J.⁸ Zukotynski, S.⁹

22
- 77957700298
- Properties of p-C:B Films using Graphite Target and Fabrication of p-C:B/n-Si Heterojunction Solar Cells
- M. Rusop, X.M. Tian, T. Soga, T. Jimbo, and M. Umeno Properties of p-C:B Films using Graphite Target and Fabrication of p-C:B/n-Si Heterojunction Solar Cells ICSE2002 Proc. 2002, Penang, Malaysia 2002 343
- (2002) ICSE2002 Proc. 2002, Penang, Malaysia , pp. 343
- Rusop, M.¹ Tian, X.M.² Soga, T.³ Jimbo, T.⁴ Umeno, M.⁵

23
- 13844251942
- M. Rusop, X.M. Tian, S.M. Mominuzzaman, T. Soga, T. Jimbo, and M. Umeno Sol. Energy 78 2005 406
- (2005) Sol. Energy , vol.78 , pp. 406
- Rusop, M.¹ Tian, X.M.² Mominuzzaman, S.M.³ Soga, T.⁴ Jimbo, T.⁵ Umeno, M.⁶

24
- 0030565892
- W. Kautek, S. Pentzien, A. Conradi, J. Krüger, and K.W. Brzezinka Appl. Surf. Sci. 106 2 1996 158
- (1996) Appl. Surf. Sci. , vol.106 , Issue.2 , pp. 158
- Kautek, W.¹ Pentzien, S.² Conradi, A.³ Krüger, J.⁴ Brzezinka, K.W.⁵

25
- 0032625432
- H.F. Cheng, F.Y. Chuang, C.H. Tsai, W.C. Wang, C.M. Huang, and I-Nan Lin Appl. Surf. Sci. 142 1999 504
- (1999) Appl. Surf. Sci. , vol.142 , pp. 504
- Cheng, H.F.¹ Chuang, F.Y.² Tsai, C.H.³ Wang, W.C.⁴ Huang, C.M.⁵ I-Nan, L.⁶

26
- 0036565049
- X.M. He, M. Hakovirta, A.M. Peters, B. Taylor, and M. Nastasi J. Vac. Sci. Technol. A 20 2002 638
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 638
- He, X.M.¹ Hakovirta, M.² Peters, A.M.³ Taylor, B.⁴ Nastasi, M.⁵

27
- 0003745178
- Prentice-Hall New Jersey
- H. Xiao Introduction to Semiconductor Manufacturing Technology 2001 Prentice-Hall New Jersey
- (2001) Introduction to Semiconductor Manufacturing Technology
- Xiao, H.¹

28
- 0041592756
- Z. Teukam, J. Chevallier, C. Saguy, R. Kalish, D. Ballutaud, M. Barbé, F. Jomard, A.T. Carli, C. Cytermann, J.E. Butler, M. Bernard, C. Baron, and A. Deneuville Nat. Mater. 2 2003 482
- (2003) Nat. Mater. , vol.2 , pp. 482
- Teukam, Z.¹ Chevallier, J.² Saguy, C.³ Kalish, R.⁴ Ballutaud, D.⁵ Barbé, M.⁶ Jomard, F.⁷ Carli, A.T.⁸ Cytermann, C.⁹ Butler, J.E.¹⁰ Bernard, M.¹¹ Baron, C.¹² Deneuville, A.¹³

29
- 4444369860
- V. Linss, S.E. Rodil, P. Reinke, M.G. Garnier, P. Oelhafen, U. Kreissig, and F. Richter Thin Solid Films 467 2004 76
- (2004) Thin Solid Films , vol.467 , pp. 76
- Linss, V.¹ Rodil, S.E.² Reinke, P.³ Garnier, M.G.⁴ Oelhafen, P.⁵ Kreissig, U.⁶ Richter, F.⁷

30
- 0033721634
- Z.F. Zhou, I. Bello, M.K. Lei, K.Y. Li, C.S. Lee, and S.T. Lee Surf. Coat. Technol. 128-129 2000 334
- (2000) Surf. Coat. Technol. , vol.128-129 , pp. 334
- Zhou, Z.F.¹ Bello, I.² Lei, M.K.³ Li, K.Y.⁴ Lee, C.S.⁵ Lee, S.T.⁶

31
- 0036508063
- Y.H. Wu, C.M. Hsu, C.T. Chia, I.N. Lin, and C.L. Cheng Diamond Relat. Mater. 11 2002 804
- (2002) Diamond Relat. Mater. , vol.11 , pp. 804
- Wu, Y.H.¹ Hsu, C.M.² Chia, C.T.³ Lin, I.N.⁴ Cheng, C.L.⁵

32
- 59149091893
- D.C. Elias, R.R. Nair, T.M.G. Mohiuddin, S.V. Morozov, P. Blake, M.P. Halsall, A.C. Ferrari, D.W. Boukhvalov, M.I. Katsnelson, A.K. Geim, and K.S. Novoselov Science 323 2009 610
- (2009) Science , vol.323 , pp. 610
- Elias, D.C.¹ Nair, R.R.² Mohiuddin, T.M.G.³ Morozov, S.V.⁴ Blake, P.⁵ Halsall, M.P.⁶ Ferrari, A.C.⁷ Boukhvalov, D.W.⁸ Katsnelson, M.I.⁹ Geim, A.K.¹⁰ Novoselov, K.S.¹¹

33
- 73849133636
- T. Gokus, R.R. Nair, A. Bonetti, M. Böhmler, A. Lombardo, K.S. Novoselov, A.K. Geim, A.C. Ferrari, and A. Hartschuh ACS Nano 3 2009 3963
- (2009) ACS Nano , vol.3 , pp. 3963
- Gokus, T.¹ Nair, R.R.² Bonetti, A.³ Böhmler, M.⁴ Lombardo, A.⁵ Novoselov, K.S.⁶ Geim, A.K.⁷ Ferrari, A.C.⁸ Hartschuh, A.⁹

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