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Volumn 94, Issue 12, 2010, Pages 1980-1995

Development of fluidized bed reactors for silicon production

Author keywords

FBR; Fluidized bed; Polysilicon; Silicon

Indexed keywords

CONVENTIONAL METHODS; ENERGY CONSUMPTION; ENERGY PAY BACK TIME; FBR; FLUIDIZED BED REACTORS; INSTALLED CAPACITY; RESEARCH GROUPS; SILICON FEEDSTOCKS; SILICON-BASED; SOLAR CELL PANELS;

EID: 77957677104     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.07.027     Document Type: Review
Times cited : (79)

References (115)
  • 9
    • 84987423948 scopus 로고
    • The effects of shape and Reynolds number on drag in the motion of a freely oriented body in an infinite fluid
    • H.A. Becker The effects of shape and Reynolds number on drag in the motion of a freely oriented body in an infinite fluid The Canadian Journal of Chemical Engineering 37 1959 85 91
    • (1959) The Canadian Journal of Chemical Engineering , vol.37 , pp. 85-91
    • Becker, H.A.1
  • 23
    • 0015382440 scopus 로고
    • Mass transfer in the flow of gases through shallow fluidized beds
    • P. Yoon, and G. Thodos Mass transfer in the flow of gases through shallow fluidized beds Chemical Engineering Science 27 1972 1549 1554
    • (1972) Chemical Engineering Science , vol.27 , pp. 1549-1554
    • Yoon, P.1    Thodos, G.2
  • 24
    • 9444291736 scopus 로고
    • Effects of natural and forced convection in vapor phase growth systems
    • B.J. Curtis, and J.P. Dismukes Effects of natural and forced convection in vapor phase growth systems Journal of Crystal Growth 17 1972 128 140
    • (1972) Journal of Crystal Growth , vol.17 , pp. 128-140
    • Curtis, B.J.1    Dismukes, J.P.2
  • 32
    • 0003280863 scopus 로고
    • Rate determining reactions and surface species in CVD of silicon
    • J. Bloem, and W.A.P. Claasen Rate determining reactions and surface species in CVD of silicon Journal of Crystal Growth 49 1980 435 444
    • (1980) Journal of Crystal Growth , vol.49 , pp. 435-444
    • Bloem, J.1    Claasen, W.A.P.2
  • 33
    • 49149148732 scopus 로고
    • Deposition of polysilicon as an example of a pyrolytic CVD process
    • J. Korec Deposition of polysilicon as an example of a pyrolytic CVD process Journal of Crystal Growth 49 1980 547 558
    • (1980) Journal of Crystal Growth , vol.49 , pp. 547-558
    • Korec, J.1
  • 37
    • 84901276350 scopus 로고
    • Assigned to California Institute of Technology US Pat 4.314.525
    • Hsu, et al., Assigned to California Institute of Technology, Fluidized bed silicon deposition from silane, US Pat 4.314.525, 1982.
    • (1982) Fluidized Bed Silicon Deposition from Silane
    • Hsu, E.1
  • 48
    • 0022873716 scopus 로고
    • Chemical vapor deposition of silicon under reduced pressure in hot-wall reactors
    • T.E. Wilke, K.A. Turner, and C.G. Takoudis Chemical vapor deposition of silicon under reduced pressure in hot-wall reactors Chemical Engineering Sci. 41 4 1986 643 650
    • (1986) Chemical Engineering Sci. , vol.41 , Issue.4 , pp. 643-650
    • Wilke, T.E.1    Turner, K.A.2    Takoudis, C.G.3
  • 49
    • 77957689570 scopus 로고
    • Washington University, Saint Louis, Mo, Thesis, Chemical Engineering
    • S.-M. Lai, Fluidized bed pyrolysis of silane, Washington University, Saint Louis, Mo, Thesis, Chemical Engineering, 1987.
    • (1987) Fluidized Bed Pyrolysis of Silane
    • Lai, S.-M.1
  • 53
  • 56
    • 77957660764 scopus 로고
    • D.Sc. Thesis, Washington University
    • Y. Yu Bo, D.Sc. Thesis, Washington University, 1988.
    • (1988)
    • Bo, Y.Yu.1
  • 60
    • 77957652127 scopus 로고
    • Assigned to Ethyl Corporation US Pat 4.868.013
    • R.H. Allen, Assigned to Ethyl Corporation, Fluidized bed process, US Pat 4.868.013, 1989.
    • (1989) Fluidized Bed Process
    • Allen, R.H.1
  • 75
    • 0022888384 scopus 로고
    • Chemical vapor deposition and homogeneous nucleation in fluidized bed reactors: Silicon from silane
    • S. Lai, M.P. Dudukovic, and P.A. Ramachandran Chemical vapor deposition and homogeneous nucleation in fluidized bed reactors: silicon from silane Chemical Engineering Science 41 1986 633 641
    • (1986) Chemical Engineering Science , vol.41 , pp. 633-641
    • Lai, S.1    Dudukovic, M.P.2    Ramachandran, P.A.3
  • 76
    • 0029395158 scopus 로고
    • Silicon deposition from silane or disilane in a fluidized bed part I: Experimental study
    • B. Caussat, M. Hemati, and J.P. Couderc Silicon deposition from silane or disilane in a fluidized bed part I: experimental study Chemical Engineering Science 50 1995 3615 3623
    • (1995) Chemical Engineering Science , vol.50 , pp. 3615-3623
    • Caussat, B.1    Hemati, M.2    Couderc, J.P.3
  • 77
    • 0029406284 scopus 로고
    • Silicon deposition from silane or disilane in a fluidized bed part II: Theoretical analysis and modeling
    • B. Caussat, M. Hemati, and J.P. Couderc Silicon deposition from silane or disilane in a fluidized bed part II: theoretical analysis and modeling Chemical Engineering Science 50 22 1995 3625 3635
    • (1995) Chemical Engineering Science , vol.50 , Issue.22 , pp. 3625-3635
    • Caussat, B.1    Hemati, M.2    Couderc, J.P.3
  • 78
    • 0031546329 scopus 로고    scopus 로고
    • The mechanism of secondary grain growth in polysilicon films
    • N.G. Nakhodki, and T.V. Rodinova The mechanism of secondary grain growth in polysilicon films Journal of Crystal Growth 171 1997 50 55
    • (1997) Journal of Crystal Growth , vol.171 , pp. 50-55
    • Nakhodki, N.G.1    Rodinova, T.V.2
  • 81
    • 0032598218 scopus 로고    scopus 로고
    • Deposition and simultaneously etching of Si in the CVD process: Approach by the charged cluster model
    • N.M. Hwang Deposition and simultaneously etching of Si in the CVD process: approach by the charged cluster model Journal of Crystal Growth 205 1999 59 63
    • (1999) Journal of Crystal Growth , vol.205 , pp. 59-63
    • Hwang, N.M.1
  • 82
    • 0034207031 scopus 로고    scopus 로고
    • Numerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of silicon
    • S.L. Girshick, M.T. Swihart, S.M. Suh, M.R. Mahajan, and S. Nijhawan Numerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of silicon Journal of Electrochemical Society 147 2000 2303 2311
    • (2000) Journal of Electrochemical Society , vol.147 , pp. 2303-2311
    • Girshick, S.L.1    Swihart, M.T.2    Suh, S.M.3    Mahajan, M.R.4    Nijhawan, S.5
  • 84
    • 0035868864 scopus 로고    scopus 로고
    • Thermal decomposition pathways and rates for silane, chlorosilane, dichlorosilane and trichlorosilane
    • S.P. Walch, and C.E. Dateo Thermal decomposition pathways and rates for silane, chlorosilane, dichlorosilane and trichlorosilane Journal of Physical Chemistry 105 2001 2015 2022
    • (2001) Journal of Physical Chemistry , vol.105 , pp. 2015-2022
    • Walch, S.P.1    Dateo, C.E.2
  • 94
    • 3142780199 scopus 로고    scopus 로고
    • Process for preparing highly pure granular silicon in a fluidized bed
    • N. Xie, F. Battaglia, and R.O. Fox Process for preparing highly pure granular silicon in a fluidized bed Combustion Theory and Modeling 8 2004 195 209
    • (2004) Combustion Theory and Modeling , vol.8 , pp. 195-209
    • Xie, N.1    Battaglia, F.2    Fox, R.O.3
  • 98
    • 0004108629 scopus 로고    scopus 로고
    • fourth ed. McGraw-Hill 1221 Avenue, New York 10020, USA
    • F.M. White Viscous Fluid Flow fourth ed. 2006 McGraw-Hill 1221 Avenue, New York 10020, USA
    • (2006) Viscous Fluid Flow
    • White, F.M.1
  • 103
    • 50949124961 scopus 로고    scopus 로고
    • Polysilicon business shines brightly
    • G. Parkinson Polysilicon business shines brightly Chemical Engineering Progress 104 8 2008 8 11
    • (2008) Chemical Engineering Progress , vol.104 , Issue.8 , pp. 8-11
    • Parkinson, G.1
  • 113
    • 62549098608 scopus 로고    scopus 로고
    • Microstructure and grain growth of polycrystalline silicon in fluidized bed reactors
    • M.M. Dahl, A. Bellou, D.F. Bahr, M.G. Norton, and E.W. Osborne Microstructure and grain growth of polycrystalline silicon in fluidized bed reactors Journal of Crystal Growth 311 2009 1496 1500
    • (2009) Journal of Crystal Growth , vol.311 , pp. 1496-1500
    • Dahl, M.M.1    Bellou, A.2    Bahr, D.F.3    Norton, M.G.4    Osborne, E.W.5
  • 114
    • 7544222590 scopus 로고    scopus 로고
    • Imperial College Press 57, Shelton Street, Covent Garden, London WC2H 9HE
    • J. Nelson The Physics of Solar Cells 2009 Imperial College Press 57, Shelton Street, Covent Garden, London WC2H 9HE
    • (2009) The Physics of Solar Cells
    • Nelson, J.1
  • 115
    • 77957656548 scopus 로고    scopus 로고
    • Photon International
    • Photon International, The Solar Power Magazine 3, 2010.
    • (2010) The Solar Power Magazine , vol.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.