Optimization of reaction conditions in a fluidized-bed for silane pyrolysis

Canadian Journal of Chemical Engineering

Volumn 82, Issue 3, 2004, Pages 520-529

  Tejero Ezpeleta, Maria P ^a   Buchholz, Sigurd ^b   Mleczko, Leslaw ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b BAYER AG   (Germany)

Author keywords

Fluidized bed; Polycrystalline silicon; Silane

Indexed keywords

CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; HYDRODYNAMICS; OPTIMIZATION; POLYCRYSTALLINE MATERIALS; PYROLYSIS; SILANES; SILICON;

BELL-JAR PROCESSES; GAS VELOCITY; POLYCRYSTALLINE SILICON PRODUCTION; SILANE PARTIAL PRESSURE;

FLUIDIZED BEDS;

SILANE;

FLUIDIZED BED; PYROLYSIS; REACTION; VAPOR DEPOSITION;

ARTICLE; FLOW RATE; FLUIDIZED BED; FLUIDIZED BED REACTOR; GAS FLOW; HYDRODYNAMICS; PARTICLE SIZE; PYROLYSIS; REACTION ANALYSIS; REACTION OPTIMIZATION; VAPOR;

EID: 11244336599     PISSN: 00084034     EISSN: None     Source Type: Journal    
DOI: 10.1002/cjce.5450820313     Document Type: Article

References (21)

1. Baysar, A., "Microwave Heating Applications of Fluidized Beds: High Purity Silicon Production", Ph.D.-Thesis, Arizona State University (1992).
2. Block, H.-D. and G. Wagner, "The Bayer Route to Low Cost Solar Grade Silicon", In Silicon for the Chemical Industry V, H.A. Øye, H.M. Rong, L. Nygaarrd, G. Schüssel, J.Kr. Tuset Eds., Tromsoe, Norway, 29 May - 2 June 2000, pp. 271-280 (2000).
3. Caussat, B., M. Hemati and J.P. Couderc, "Silicon Deposition from Silane or Disilane in a Fluidized Bed - Part I: Experimental Study", Chem. Eng. Sci. 50, 3615-3624 (1995).
4. Davidson J.F. and D. Harrison, "Fluidization", Academic Press Inc., London, (1971).
5. Dudukovich, M.P., S. Lai, and P.A. Ramachandran, "Chemical Vapor Deposition and Homogeneous Nucleation in Fluidized Bed Reactors: Silicon from Silane", Chem. Eng. Sci. 41, 633-641 (1986).
6. Frenklach, M., L. Ting, H. Wang, and M.J. Rabinowitz, "Silicon Particle Formation in Pyrolysis of Silane and Disilane", Israel Journal of Chemistry 36, 293-303 (1996).
7. Furusawa, T., T. Kojima, and H. Hiroha, "Chemical Vapor Deposition and Homogeneous Nucleation in Monosilane Pyrolysis within Interparticle Spaces - Application of Fines Formation Analysis to Fluidized Bed CVD-" Chem. Eng. Sci. 43(8), 2037-2042 (1988).
8. Hsu G., R. Hogle, N. Rohatgi and A. Morrison; "Fines in Fluidized Bed Silane Pyrolysis", J. Electrochem. Soc: Solid-State Science and Technology, 660-663 (1984 a).
9. Ibrahim, J. and S.W. Johnston, "High Purity Polysilicon Production from Silane by Fluidized Bed Process", in "Proc. 2nd Symp. Fluidized Bed Processing of Powder Materials", Soc. Chem. Eng. Jpn., 26-36 (1990).
10. Ikeda, T. and M. Maeda, "Purification of Metallurgical Silicon for Solar-Grade Silicon by Electron Beam Button Melting", ISIJ International, 32 (5), 635-642 (1992).
11. Kang, S., M.W. Han, J.Y. Jeon, D.W. Park and P. Yoon., "Modeling and Simulation of Particle Size Distribution in Steady State Continues CVD Fluidized Bed Reactor", Hawahak Konghak, 25, 327-335 (1987).
12. Kim, H.Y., M. Y. Song, J.Y. Jeon, D.H. Kwon, K.M. Lee, J.S. Lee and D.S. Park, "Heating of Fluidized Bed Reactors", (1994) Patent US 5374413.
13. Kojima, T., K. Iwata, T. Furusawa, "Production of Polycrystalline Silicon by Monosilane Pyrolysis in a Fluidized Bed", J. Chem. Eng. Jap. 22(6), 327-334 (1989).
14. Kojima, T. and O. Morisawa, "Optimum Process Conditions for Stable and Effective Operation of a Fluidized Bed CVD Reactor for Polycrystalline Silicon Production", J. Physique 4(C2), 474-482 (1991).
15. 4-Ar System" Intern. Chem. Eng., 32, 739-749 (1992).
16. Kunii D. and O. Levenspiel; "Fluidization Engineering" 2nd Ed., Butterworth-Heinrmann, Stoneham, MA (1991), pp. 61-93.
17. Rohatgi, N., G. Hsu and R. Lutwack, "Silane Pyrolysis in a Fluidized Bed Reactor", Proceedings - Electrochemical Society, Materials and New Processing Technologies for Photovoltaics 477-487 (1982).
18. Rohatgi, N., "Silicon Production in a Fluidized Bed Reactor: Final Report", DOE/JPL-1012-123, (1986 a).
19. Rohatgi, N., "Fluid Bed Silane Decomposition", Final Report for Phase IV, DOE/JPL-954334-T22, (1986 b).
20. Tilg, A. and L. Mleczko, "Predective Model of Silane Pyrolysis in a Fluid-Bed Reactor", in "Silicon for the Chemical Industry V",H. A. Øye, H.M. Rong, L. Nygaarrd, G. Schüssel, J.Kr. Tuset Eds., Tromsoe, Norway, 29 May - 2 June 2000, pp. 281-295 (2000).
21. Varadi, P.F., "PV - Why Are We Waiting", Renewable Energy World, 3, 12 (1998).