SCOPUS 정보 검색 플랫폼

Journal of Crystal Growth

Volumn 171, Issue 1-2, 1997, Pages 50-55

The mechanism of secondary grain growth in polysilicon films

(2) Nakhodkin, N G a Rodionova, T V a

a TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COALESCENCE; DISLOCATIONS (CRYSTALS); GRAIN GROWTH; INTERFACIAL ENERGY; PHOSPHORUS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; TRANSMISSION ELECTRON MICROSCOPY;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION; POLYSILICON FILMS;

SEMICONDUCTING FILMS;

EID: 0031546329 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(96)00476-9 Document Type: Article

Times cited : (14)

References (18)

1
- 3743097426
- V.K. Georgiev and L.I. Popova et al., Poverkhnost. Fiz. Khim. Mekh. 9 (1990) 5.
- (1990) Poverkhnost. Fiz. Khim. Mekh. , vol.9 , pp. 5
- Georgiev, V.K.¹ Popova, L.I.²

2
- 2342644452
- L. Haji, L. Hamedi, B. Loisel, M. Gauneau, P. Joubert and M. Sarret, J. Appl. Phys. 66 (1989) 4812.
- (1989) J. Appl. Phys. , vol.66 , pp. 4812
- Haji, L.¹ Hamedi, L.² Loisel, B.³ Gauneau, M.⁴ Joubert, P.⁵ Sarret, M.⁶

3
- 0026938805
- N.G. Nakhodkin and T.V. Rodionova, Surf. Interface Anal. 18 (1992) 709.
- (1992) Surf. Interface Anal. , vol.18 , pp. 709
- Nakhodkin, N.G.¹ Rodionova, T.V.²

4
- 0027624838
- S. Batra, K. Picone, K.H. Park, S. Bhattacharya, S. Banerjee, J. Lee, M. Manning and C. Dennison, Solid-State Electron. 36 (1993) 955.
- (1993) Solid-state Electron. , vol.36 , pp. 955
- Batra, S.¹ Picone, K.² Park, K.H.³ Bhattacharya, S.⁴ Banerjee, S.⁵ Lee, J.⁶ Manning, M.⁷ Dennison, C.⁸

5
- 0001356944
- C.V. Thompson, J. Appl. Phys. 50 (1985) 763.
- (1985) J. Appl. Phys. , vol.50 , pp. 763
- Thompson, C.V.¹

6
- 0024070733
- H.-J. Kim and C.V. Thompson, J. Electrochem. Soc. 135 (1983) 2312.
- (1983) J. Electrochem. Soc. , vol.135 , pp. 2312
- Kim, H.-J.¹ Thompson, C.V.²

7
- 0023329269
- C.V. Thompson, H.J. Trost and F. Spaepen, Acta Met. 35 (1987) 887.
- (1987) Acta Met. , vol.35 , pp. 887
- Thompson, C.V.¹ Trost, H.J.² Spaepen, F.³

8
- 5244256818
- C.V. Thompson, Acta Met. 36 (1988) 2929.
- (1988) Acta Met. , vol.36 , pp. 2929
- Thompson, C.V.¹

9
- 0142098418
- S.M. Garrison, R.S. Cammarata and C.V. Thompson, J. Appl. Phys. 61 (1987) 1652.
- (1987) J. Appl. Phys. , vol.61 , pp. 1652
- Garrison, S.M.¹ Cammarata, R.S.² Thompson, C.V.³

10
- 0024650272
- A.D. Rollett, D.J. Srolowitz and M.P. Anderson, Acta Met. 37 (1989) 1227.
- (1989) Acta Met. , vol.37 , pp. 1227
- Rollett, A.D.¹ Srolowitz, D.J.² Anderson, M.P.³

11
- 0000821828
- H.-J. Kim and C.V. Thompson, J. Appl. Phys. 67 (1990) 757.
- (1990) J. Appl. Phys. , vol.67 , pp. 757
- Kim, H.-J.¹ Thompson, C.V.²

12
- 0022955465
- H.-J. Kim and C.V. Thompson, Trans. Jpn. Inst. Met., Suppl. 27 (1986) 495.
- (1986) Trans. Jpn. Inst. Met., Suppl. , vol.27 , pp. 495
- Kim, H.-J.¹ Thompson, C.V.²

13
- 0021393552
- C.V. Thompson and H.I. Smith, Appl. Phys. Lett. 44 (1984) 603.
- (1984) Appl. Phys. Lett. , vol.44 , pp. 603
- Thompson, C.V.¹ Smith, H.I.²

14
- 0026108578
- N.G. Nakhodkin and T.V. Rodionova, Phys. Status Solidi (a) 123 (1991) 431.
- (1991) Phys. Status Solidi (A) , vol.123 , pp. 431
- Nakhodkin, N.G.¹ Rodionova, T.V.²

15
- 84990665488
- T.V. Rodionova, V.G. Kobka and N.G. Nakhodkin, Kristallografiya 33 (1988) 1207.
- (1988) Kristallografiya , vol.33 , pp. 1207
- Rodionova, T.V.¹ Kobka, V.G.² Nakhodkin, N.G.³

16
- 0018011483
- Y. Wada and S. Nishimatsu, J. Electrochem. Soc. 125 (1978) 1499.
- (1978) J. Electrochem. Soc. , vol.125 , pp. 1499
- Wada, Y.¹ Nishimatsu, S.²

17
- 0001807768
- Nauka i Tekhnika, Minsk
- E.I. Tochitskii, Kristallizatsiya i Termoobrabotka Tonkikh Plenok (Nauka i Tekhnika, Minsk, 1976) p. 185.
- (1976) Kristallizatsiya i Termoobrabotka Tonkikh Plenok , pp. 185
- Tochitskii, E.I.¹

18
- 0011330145
- Vysshaya Shkola, Moskva
- A.N. Orlov, Vvedenie v Teoriyu Defektov v Kristallakh (Vysshaya Shkola, Moskva, 1983) p. 143.
- (1983) Vvedenie v Teoriyu Defektov v Kristallakh , pp. 143
- Orlov, A.N.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.