Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor

Journal of Engineering Physics and Thermophysics

Volumn 78, Issue 1, 2005, Pages 47-53

  Borodulya, V A ^a   Vinogradov, L M ^a   Rabinovich, O S ^a   Akulich, A V ^a  

^a A V LUIKOV HEAT AND MASS TRANSFER INSTITUTE   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDIZED BEDS; MATHEMATICAL MODELS; PYROLYSIS;

FLUIDIZED-BED REACTORS; PYROLYTIC DECOMPOSITION; TWO-PHASE MODEL;

POLYSILICON;

EID: 24944515095     PISSN: 10620125     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10891-005-0028-3     Document Type: Conference Paper

References (10)

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10. V. A. Borodulya, L. M. Vinogradov, O. S. Rabinovich, A. V. Akulich, P. S. Grinchuk, V. P. Vasilevich, V. N. Stepanenko, A. V. Vasyukov, and O. L. Kaidov, Pyrolysis decomposition of monosilane in the fluidized-bed reactor with formation of granulated silicon, in: Heat and Mass Transfer-2003 [in Russian], ITMO NAN Belarusi, Minsk (2003), pp. 66-72.