메뉴 건너뛰기




Volumn 4, Issue , 2006, Pages 1-21

Modeling a silicon CVD spouted bed pilot plant reactor

Author keywords

Granulation; Modeling; Silicon CVD; Spouted bed

Indexed keywords

AGGLOMERATION; CHEMICAL VAPOR DEPOSITION; FLUIDIZED BEDS; GRANULATION; HYDRODYNAMICS; MATHEMATICAL MODELS; SILICON;

EID: 33645017928     PISSN: 21945748     EISSN: 15426580     Source Type: Journal    
DOI: 10.2202/1542-6580.1306     Document Type: Article
Times cited : (23)

References (34)
  • 1
    • 8344275054 scopus 로고    scopus 로고
    • Part I: Dynamic evolution of the particle size distribution in particulate processes undergoing combined particle growth and aggregation
    • Alexopolous, A.H., Roussos, A.I., Kiparissides, C., "Part I: Dynamic Evolution of the Particle Size Distribution in Particulate Processes undergoing Combined Particle Growth and Aggregation", Chem. Eng. Sci., Vol. 59, No. 24, 5751-5769, (2005).
    • (2005) Chem. Eng. Sci. , vol.59 , Issue.24 , pp. 5751-5769
    • Alexopolous, A.H.1    Roussos, A.I.2    Kiparissides, C.3
  • 3
    • 84985630862 scopus 로고
    • The grid region in a fluidized bed reactor
    • Behie, L. A., Kehoe, P., "The Grid Region in a Fluidized Bed Reactor", AIChE J., Vol. 19, No. 5, 1070-1072, (1973).
    • (1973) AIChE J. , vol.19 , Issue.5 , pp. 1070-1072
    • Behie, L.A.1    Kehoe, P.2
  • 4
    • 0029395158 scopus 로고
    • Silicon deposition from silane or disilane in a fluidized bed-part I: Experimental study
    • Caussat, B., Hemati, M., Couderc, J.P., "Silicon Deposition from Silane or Disilane in a Fluidized Bed-Part I: Experimental Study", Chem. Eng. Sci., Vol. 50, No. 22, 3615-3624, (1995a).
    • (1995) Chem. Eng. Sci. , vol.50 , Issue.22 , pp. 3615-3624
    • Caussat, B.1    Hemati, M.2    Couderc, J.P.3
  • 5
    • 0029406284 scopus 로고
    • Silicon deposition from silane or disilane in a fluidized bed-part II: Theoretical analysis and modeling
    • Caussat, B., Hemati, M., Couderc, J.P., "Silicon Deposition from Silane or Disilane in a Fluidized Bed-Part II: Theoretical Analysis and Modeling", Chem. Eng. Sci., Vol. 50, No. 22, 3625-3635, (1995b).
    • (1995) Chem. Eng. Sci. , vol.50 , Issue.22 , pp. 3625-3635
    • Caussat, B.1    Hemati, M.2    Couderc, J.P.3
  • 8
    • 0024124703 scopus 로고
    • Chemical vapor deposition and homogeneous nucleation in monosilane pyrolysis within interparticle spaces - Application of fines formation analysis to fluidized-bed CVD
    • Furusawa T., Kojima T., Hiroha H., "Chemical Vapor Deposition and Homogeneous Nucleation in Monosilane Pyrolysis within Interparticle Spaces - Application of Fines Formation Analysis to Fluidized-Bed CVD", Chemical Engineering Science, Vol. 43, No. 8, 2037-2042, (1988).
    • (1988) Chemical Engineering Science , vol.43 , Issue.8 , pp. 2037-2042
    • Furusawa, T.1    Kojima, T.2    Hiroha, H.3
  • 10
    • 0024656468 scopus 로고
    • Drag coefficient and terminal velocity of spherical and nonspherical particles
    • Haider, A., Levenspiel, O., "Drag Coefficient and Terminal Velocity of Spherical and Nonspherical Particles", Powder Technology, Vol. 58, 63-70, (1989).
    • (1989) Powder Technology , vol.58 , pp. 63-70
    • Haider, A.1    Levenspiel, O.2
  • 11
    • 0036868380 scopus 로고    scopus 로고
    • Analysis of the start-up process in continuous fluidized bed spray granulation by population balance modeling
    • Heinrich S., Peglow M., Ihlow M., Henneberg, M., Mörl L., "Analysis of the Start-up Process in Continuous Fluidized Bed Spray Granulation by Population Balance Modeling", Chem. Eng. Sci., Vol. 57, No. 20, 4369-4390, (2002).
    • (2002) Chem. Eng. Sci. , vol.57 , Issue.20 , pp. 4369-4390
    • Heinrich, S.1    Peglow, M.2    Ihlow, M.3    Henneberg, M.4    Mörl, L.5
  • 15
    • 0023344425 scopus 로고
    • Silicon particle growth in a fluidized-bed reactor
    • Hsu, G., Rohatgi, N., Houseman, J., "Silicon Particle Growth in a Fluidized-Bed Reactor", AICHE Journal, Vol. 33, No. 5, 784-791, (1987).
    • (1987) AICHE Journal , vol.33 , Issue.5 , pp. 784-791
    • Hsu, G.1    Rohatgi, N.2    Houseman, J.3
  • 16
    • 0020151790 scopus 로고
    • Heterogeneous decomposition of silane in a fixed bed reactor
    • Iya, S. K., Flagella, R. N., DiPaolo, F. S., "Heterogeneous Decomposition of Silane in a Fixed Bed Reactor", Journal of the Electrochemical Society, Vol. 129, No. 7, 1531-1535, (1982).
    • (1982) Journal of the Electrochemical Society , vol.129 , Issue.7 , pp. 1531-1535
    • Iya, S.K.1    Flagella, R.N.2    DiPaolo, F.S.3
  • 17
    • 0014552424 scopus 로고
    • Bubble assemblage model for fluidized bed catalytic reactors
    • Kato, K., Wen, Y.C., "Bubble Assemblage Model for Fluidized Bed Catalytic Reactors", Chem. Eng. Sci.,Vol. 24, No. 8, 1351-1369, (1969).
    • (1969) Chem. Eng. Sci. , vol.24 , Issue.8 , pp. 1351-1369
    • Kato, K.1    Wen, Y.C.2
  • 18
    • 0025626702 scopus 로고
    • Development of numerical model for reactions in fluidized bed grid zone-application to chemical vapor deposition of polycristalline silicon by monosilane pyrolysis
    • Kojima, T., Kimura, T., Matsukata, M., "Development of Numerical Model for Reactions in Fluidized Bed Grid Zone-Application to Chemical Vapor Deposition of Polycristalline Silicon by Monosilane Pyrolysis", Chem. Eng. Sci., Vol. 45, No. 8, 2527-2534, (1990).
    • (1990) Chem. Eng. Sci. , vol.45 , Issue.8 , pp. 2527-2534
    • Kojima, T.1    Kimura, T.2    Matsukata, M.3
  • 19
    • 0030128282 scopus 로고    scopus 로고
    • On the solution of population balance equations by discretization-I. A fixed pivot technique
    • Kumar S., Ramkrishna, D., "On the Solution of Population Balance Equations by Discretization-I. A Fixed Pivot Technique", Chem. Eng. Sci., Vol. 51, No. 8, 1311-1332, (1996).
    • (1996) Chem. Eng. Sci. , vol.51 , Issue.8 , pp. 1311-1332
    • Kumar, S.1    Ramkrishna, D.2
  • 20
    • 0031553395 scopus 로고    scopus 로고
    • On the solution of population balance equations by discretization-Ill. Nucleation, growth and aggregation of particles
    • Kumar S., Ramkrishna, D., "On the Solution of Population Balance Equations by Discretization-Ill. Nucleation, Growth and Aggregation of Particles", Chem. Eng. Sci., Vol. 52, No. 24, 4659-4679, (1997).
    • (1997) Chem. Eng. Sci. , vol.52 , Issue.24 , pp. 4659-4679
    • Kumar, S.1    Ramkrishna, D.2
  • 21
    • 33947303529 scopus 로고
    • Bubbling bed model. Model for flow of gas through a fluidized bed
    • Kunii D., Eevenspiel O., "Bubbling Bed Model. Model for Flow of Gas through a Fluidized Bed", Ind. Eng. Chem. Fundam., Vol. 7, No. 3, 446-452, (1968).
    • (1968) Ind. Eng. Chem. Fundam. , vol.7 , Issue.3 , pp. 446-452
    • Kunii, D.1    Eevenspiel, O.2
  • 22
    • 0025458930 scopus 로고
    • Fluidized reactor models. 1. For bubbling bed of fines, intermediate and large particles. 2. For the lean phase: Freeboard and fast fluidization
    • Kunii D., Levenspiel O., Fluidized Reactor Models. 1. For Bubbling Bed of Fines, Intermediate and Large Particles. 2. For the Lean Phase: Freeboard and Fast Fluidization", Ind. Eng. Chem. Res., Vol. 29, No. 7, 1226-1234, (1990).
    • (1990) Ind. Eng. Chem. Res. , vol.29 , Issue.7 , pp. 1226-1234
    • Kunii, D.1    Levenspiel, O.2
  • 24
    • 0022888384 scopus 로고
    • Chemical vapor deposition and homogeneous nucleation on fluidized bed reactors: Silicon from silane
    • Lai, S., Dudukovic, M.P., Ramachandran, P.A., "Chemical Vapor Deposition and Homogeneous Nucleation on Fluidized Bed Reactors: Silicon from Silane", Chem. Eng. Sci., Vol. 41, No. 4, 633-641, (1986).
    • (1986) Chem. Eng. Sci. , vol.41 , Issue.4 , pp. 633-641
    • Lai, S.1    Dudukovic, M.P.2    Ramachandran, P.A.3
  • 25
    • 0035667765 scopus 로고    scopus 로고
    • Adaptive mesh method for the simulation of crystallization processes including agglomeration and breakage: The potassium sulfate system
    • Lee, G., Yoon, E.S., Lim, Y.-I., Le Latin, J.M., Meyer, X.-M., Joulia, X., "Adaptive Mesh Method for the Simulation of Crystallization Processes Including Agglomeration and Breakage: the Potassium Sulfate System", Ind. Eng. Chem. Res., Vol. 40, 6228-6235, (2001).
    • (2001) Ind. Eng. Chem. Res. , vol.40 , pp. 6228-6235
    • Lee, G.1    Yoon, E.S.2    Lim, Y.-I.3    Le Latin, J.M.4    Meyer, X.-M.5    Joulia, X.6
  • 26
    • 0024872773 scopus 로고
    • Prediction of silicon powder elutriation in a fluidized-bed reactor for the silane decomposition reaction
    • Fluidization and Fluid-Particle Systems-Fundamentals and Applications
    • Li, K.Y., Peng, S.H., Ho, T.C., "Prediction of Silicon Powder Elutriation in a Fluidized-Bed Reactor for the Silane Decomposition Reaction", Fluidization and Fluid-Particle Systems-Fundamentals and Applications, AIChE Symposium Series, Vol. 85, No. 270, 77-80, (1989).
    • (1989) AIChE Symposium Series , vol.85 , Issue.270 , pp. 77-80
    • Li, K.Y.1    Peng, S.H.2    Ho, T.C.3
  • 27
    • 33645035377 scopus 로고    scopus 로고
    • "Advanced Silicon Materials", US Patent, 5, 798, 137
    • Lord, S.M., Milligan, R. J., "Advanced Silicon Materials", US Patent, 5, 798, 137, (1998).
    • (1998)
    • Lord, S.M.1    Milligan, R.J.2
  • 31
    • 0036533230 scopus 로고    scopus 로고
    • Silicon feedstock for the multi-crystalline photovoltaic industry
    • Sarti D., Einhaus R., "Silicon Feedstock for the Multi-crystalline Photovoltaic Industry", Solar Energy Materials and Solar Cells, Vol.72, 27-40, (2002).
    • (2002) Solar Energy Materials and Solar Cells , vol.72 , pp. 27-40
    • Sarti, D.1    Einhaus, R.2
  • 33
    • 11244265228 scopus 로고    scopus 로고
    • Predictive model of silane pyrolysis in a fluid-bed reactor
    • TromsØ, Norway
    • Tilg, A., Mleczko, L., "Predictive Model of Silane Pyrolysis in a fluid-bed reactor", Silicon for the Chemical Industry V, TromsØ, Norway, (2000).
    • (2000) Silicon for the Chemical Industry V
    • Tilg, A.1    Mleczko, L.2
  • 34
    • 0036533112 scopus 로고    scopus 로고
    • Solar grade silicon feedstock supply for the PV industry
    • Woditsch P., Koch W., "Solar Grade Silicon Feedstock Supply for the PV Industry", Solar Energy Materials and Solar Cells, Vol.72, 11-26, (2002).
    • (2002) Solar Energy Materials and Solar Cells , vol.72 , pp. 11-26
    • Woditsch, P.1    Koch, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.