Monolithically integrated two-axis microtensile tester for the mechanical characterization of microscopic samples

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1223-1233

  Muntwyler, Simon ^a   Kratochvil, Bradley E ^a   Beyeler, Felix ^a   Nelson, Bradley J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Calibration; capacitive microforce and position sensing; electrostatic actuation; uncertainty analysis

Indexed keywords

BULK SILICON; CALIBRATION CHAIN; ELECTROSTATIC ACTUATION; FEED-BACK SENSORS; FORCE SENSOR; INTEGRATED CAPACITIVE POSITION SENSOR; MEASUREMENT DATA; MECHANICAL CHARACTERIZATIONS; MICRO-FORCE SENSORS; MICROFORCES; MICROTENSILE; MODEL-BASED SIMULATIONS; MONOLITHICALLY INTEGRATED; PLANT CELLS; PLANT GROWTH; POSITION RESOLUTION; REFERENCE STANDARD; STIFFNESS MEASUREMENTS; TENSILE TESTERS; TWO-AXIS;

ACTUATORS; CALIBRATION; COMPUTER SIMULATION; ELECTRIC CONVERTERS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MONOLITHIC INTEGRATED CIRCUITS; MONTE CARLO METHODS; SENSORS; STIFFNESS;

UNCERTAINTY ANALYSIS;

EID: 77957567674     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067443     Document Type: Article

References (20)

1. M. Hulskamp, Plant trichomes: A model for cell differentiation, Nat. Rev. Mol. Cell Biol., vol.5, no.6, pp. 471-480, Jun. 2004.
2. A. Geitmann and J. K. E. Ortega, Mechanics and modeling of plant cell growth, Trends Plant Sci., vol.14, no.9, pp. 467-478, Sep. 2009.
3. Y. Zhu and H. D. Espinosa, An electromechanical material testing system for in situ electron microscopy and applications, Proc. Nat. Acad. Sci. USA, vol.102, no.41, pp. 14 503-14 508, Oct. 11, 2005. (Pubitemid 41457087)
4. J. J. Brown, J. W. Suk, G. Singh, A. I. Baca, D. A. Dikin, R. S. Ruoff, and V.M. Bright, Microsystem for nanofiber electromechanical measurements, Sens. Actuators A, Phys., vol.155, no.1, pp. 1-7, Oct. 2009.
5. H. Kahn, R. Ballarini, R. L. Mullen, and A. H. Heuer, Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens, Proc. R. Soc. A-Math. Phys. Eng. Sci., vol.455, no.1990, pp. 3807-3823, Oct. 8, 1999.
6. M. T. A. Saif and N. C. MacDonald, A millinewton microloading device, Sens. Actuators A, Phys., vol.52, no.1-3, pp. 65-75, Mar./Apr. 1996.
7. H. Sato, T. Fukuda, F. Arai, K. Itoigawa, and Y. Tsukahara, Parallel-beam sensor/actuator unit and its application to the gyroscope, IEEE/ASME Trans. Mechatronics, vol.5, no.3, pp. 266-272, Sep. 2000.
8. Y. Sun, S. N. Fry, D. P. Potasek, D. J. Bell, and B. J. Nelson, Characterizing fruit fly flight behavior using a microforce sensor with a new combdrive configuration, J. Microelectromech. Syst., vol.14, no.1, pp. 4-11, Feb. 2005.
9. F. Beyeler, A. Neild, S. Oberti, D. J. Bell, Y. Sun, J. Dual, and B. J. Nelson, Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field, J. Microelectromech. Syst., vol.16, no.1, pp. 7-15, Feb. 2007.
10. F. Beyeler, S. Muntwyler, Z. Nagy, C. Graetzel, M. Moser, and B. J. Nelson, Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot, J. Micromech. Microeng., vol.18, no.2, p. 025 004, Feb. 2008.
11. S. Muntwyler, F. Beyeler, and B. J. Nelson, Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range, J. Micromech. Microeng., vol.20, no.2, p. 025011, Feb. 2010.
12. K. Kim, Y. Sun, R. M. Voyles, and B. J. Nelson, Calibration of multiaxis MEMS force sensors using the shape-from-motion method, IEEE Sensors J., vol.7, no.3, pp. 344-351, Mar./Apr. 2007.
13. N. A. Burnham, X. Chen, C. S. Hodges, G. A. Matei, E. J. Thoreson, C. J. Roberts, M. C. Davies, and S. J. B. Tendler, Comparison of calibration methods for atomic-force microscopy cantilevers, Nanotechnology, vol.14, no.1, pp. 1-6, Jan. 2003.
14. J. R. Pratt, J. A. Kramar, D. B. Newell, and D. T. Smith, Review of SI traceable force metrology for instrumented indentation and atomic force microscopy, Meas. Sci. Technol., vol.16, no.11, pp. 2129-2137, Nov. 2005.
15. Joint Committees for Guides in Metrology, Guide to the Expression of Uncertainty in Measurement, Int. Org. Standardization, Geneva, Switzerland, 2008.
16. Joint Committees for Guides in Metrology, International Vocabulary of Metrology-Basic and General Concepts and Associated Terms (VIM), p. 25, Int. Org. Standardization, Geneva, Switzerland, 2007.
17. Joint Committees for Guides in Metrology, Supplement 1 to the Guide to the Expression of Uncertainty in Measurement-Propagation of Distributions Using a Monte Carlo Method, Int. Org. Standardization, Geneva, Switzerland, 2008.
18. Joint Committees for Guides in Metrology, Draft Supplement 2 to the Guide to the Expression of Uncertainty in Measurement-Models With Any Number of Output Quantities, Int. Org. Standardization, Geneva, Switzerland, 2009, Draft.
19. I. Marson, H. Kahle, F. Chaperon, S. Mueller, and F. Alasia, Absolute gravity measurements in Switzerland: Definition of a base network for geodynamic investigations and for the Swiss fundamental gravity net, J. Geod., vol.55, no.3, pp. 203-217, 1981.
20. B. E. Kratochvil, L. X. Dong, and B. J. Nelson, Real-time rigid-body visual tracking in a scanning electron microscope, Int. J. Robot. Res., vol.28, no.4, pp. 498-511, Apr. 2009.