Liquid-phase chemical sensing using lateral mode resonant cantilevers

Analytical Chemistry

Volumn 82, Issue 18, 2010, Pages 7542-7549

  Beardslee, L A ^a   Demirci, K S ^a   Luzinova, Y ^a   Mizaikoff, B ^b,c   Heinrich, S M ^a   Josse, F ^b   Brand, O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b MARQUETTE UNIVERSITY   (United States)

^c UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTE CONCENTRATION; ANALYTES; BULK- MICROMACHINING; CHEMICAL SENSING; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; CONCENTRATION RANGES; DETECTION LIMITS; FABRICATION PROCESS; FLEXURAL MODES; FLUID DAMPING; IN-PLANE; LATERAL MODES; LIQUID PHASE; LOW QUALITIES; OUT-OF-PLANE; PARTS PER BILLION; POLY(ISOBUTYLENE); Q-FACTORS; RESONANT CANTILEVER; RESONANT MODE; SENSING APPLICATIONS; SENSING PROPERTY; SENSITIVE LAYERS; SENSITIVE POLYMERS; VOLATILE ORGANICS;

AIR; ATOMIC FORCE MICROSCOPY; BUTENES; CHEMICAL SENSORS; DAMPING; ETHYLENE; FABRICATION; METALLIC COMPOUNDS; MOS DEVICES; NANOCANTILEVERS; PLASTIC COATINGS; POLYMERS; PROPYLENE; Q FACTOR MEASUREMENT; SORPTION; VOLATILE ORGANIC COMPOUNDS;

LIQUIDS;

ORGANIC COMPOUND; POLYMER; WATER;

ARTICLE; CHEMICAL ANALYSIS; CHEMISTRY; INSTRUMENTATION; LIMIT OF DETECTION; TEMPERATURE; VOLATILIZATION;

CHEMISTRY TECHNIQUES, ANALYTICAL; LIMIT OF DETECTION; ORGANIC CHEMICALS; POLYMERS; TEMPERATURE; VOLATILIZATION; WATER;

EID: 77956606235     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac1010102     Document Type: Article

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