Thermal excitation and piezoresistive detection of cantilever in-plane resonance modes for sensing applications

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 1015-1017

  Beardslee, Luke Armitage ^a   Addous, Assim M ^a   Heinrich, Stephen ^b   Josse, Fabien ^b   Dufour, Isabelle ^c   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Marquette University   (United States)

^c UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Cantilever; liquid operation; piezoresistive detection; resonant sensor

Indexed keywords

RESONANCE;

BULK-MICROMACHINED; CANTILEVER; IN-PLANE RESONANCE; LIQUID OPERATION; PIEZORESISTIVE DETECTION; RESONANT SENSORS; SENSING APPLICATIONS; THERMAL EXCITATION;

NANOCANTILEVERS;

EID: 77955425361     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2052093     Document Type: Article

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