Tracking microresonator Q-factor in closed-loop operation

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 190-193

  Seo, J H ^a   Demirci, K S ^a   Truax, S ^a   Beardslee, L A ^a   Brand, O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROSYSTEMS; RESONATORS; SOLID-STATE SENSORS;

AMBIENT TEMPERATURE CHANGE; CLOSED-LOOP OPERATION; FREQUENCY MEASUREMENTS; MICRO RESONATORS; MICROMACHINED RESONATORS; QUALITY FACTORS; STIFFNESS MODULATION; TRACKING APPROACHES;

Q FACTOR MEASUREMENT;

EID: 77956570827     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.51     Document Type: Conference Paper

References (10)

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