Chemical microsystem based on integration of microresonant sensor and CMOS ASIC

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 2009, Pages 515-518

  Demirci, K S ^a   Truax, S ^a   Beardslee, L A ^a   Brand, O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MICROSYSTEM; CMOS ASIC; FEEDBACK CIRCUITRY; GASPHASE; LIMIT OF DETECTION; MECHANICAL RESONANCE FREQUENCY; RESONANT SENSORS; SENSING APPLICATIONS; SILICON-BASED MICROSYSTEMS;

APPLICATION SPECIFIC INTEGRATED CIRCUITS; ELECTRIC POWER SUPPLIES TO APPARATUS; INTEGRATED CIRCUITS; MICROSYSTEMS; RESONANCE; TOLUENE; VOLATILE ORGANIC COMPOUNDS;

SENSORS;

EID: 74049090862     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CICC.2009.5280797     Document Type: Conference Paper

References (8)

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