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Volumn 13, Issue 11, 2010, Pages

High quality strained Ge epilayers on a Si0.2 Ge0.8 /Ge/Si (100) global strain-tuning platform

Author keywords

[No Author keywords available]

Indexed keywords

HETEROSTRUCTURES; HIGH QUALITY; LAYER THICKNESS; REDUCED PRESSURE CHEMICAL VAPOR DEPOSITION; SI (100) SUBSTRATE; SMOOTH SURFACE; STRAINED-GE; STRUCTURAL QUALITIES; THREADING DISLOCATION DENSITIES;

EID: 77956583758     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3482159     Document Type: Article
Times cited : (30)

References (15)
  • 1
    • 34548268224 scopus 로고    scopus 로고
    • Observation of two-dimensional hole gas with mobility and carrier density exceeding those of two-dimensional electron gas at room temperature in the SiGe heterostructures
    • DOI 10.1063/1.2773744
    • M. Myronov, K. Sawano, Y. Shiraki, T. Mouri, and K. M. Itoh, Appl. Phys. Lett. APPLAB 0003-6951, 91, 082108 (2007). 10.1063/1.2773744 (Pubitemid 47318959)
    • (2007) Applied Physics Letters , vol.91 , Issue.8 , pp. 082108
    • Myronov, M.1    Sawano, K.2    Shiraki, Y.3    Mouri, T.4    Itoh, K.M.5
  • 5
    • 79956054779 scopus 로고    scopus 로고
    • Very high hole mobilities in modulation-doped Ge quantum wells grown by low-energy plasma enhanced chemical vapor deposition
    • DOI 10.1063/1.1470691
    • H. von Känel, M. Kummer, G. Isella, E. Müller, and T. Hackbarth, Appl. Phys. Lett. APPLAB 0003-6951, 80, 2922 (2002). 10.1063/1.1470691 (Pubitemid 34599199)
    • (2002) Applied Physics Letters , vol.80 , Issue.16 , pp. 2922
    • Von Kanel, H.1    Kummer, M.2    Isella, G.3    Muller, E.4    Hackbarth, T.5
  • 6
    • 0000059047 scopus 로고    scopus 로고
    • Controlling threading dislocation densities in Ge on Si using graded SiGe layers and chemical-mechanical polishing
    • DOI 10.1063/1.121162, PII S0003695198012145
    • M. T. Currie, S. B. Samavedam, T. A. Langdo, C. W. Leitz, and E. A. Fitzgerald, Appl. Phys. Lett. APPLAB 0003-6951, 72, 1718 (1998). 10.1063/1.121162 (Pubitemid 128671439)
    • (1998) Applied Physics Letters , vol.72 , Issue.14 , pp. 1718-1720
    • Currie, M.T.1    Samavedam, S.B.2    Langdo, T.A.3    Leitz, C.W.4    Fitzgerald, E.A.5
  • 14
    • 21544464728 scopus 로고
    • APPLAB 0003-6951,. 10.1063/1.96206
    • R. People and J. C. Bean, Appl. Phys. Lett. APPLAB 0003-6951, 47, 322 (1985). 10.1063/1.96206
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 322
    • People, R.1    Bean, J.C.2
  • 15
    • 77956568907 scopus 로고    scopus 로고
    • in 2010 International Conference on Solid State Devices and Materials (SSDM 2010), The University of Tokyo,.
    • M. Myronov, K. Sawano, D. R. Leadley, and Y. Shiraki, in 2010 International Conference on Solid State Devices and Materials (SSDM 2010), The University of Tokyo, p. K81, (2010).
    • (2010) , pp. 81
    • Myronov, M.1    Sawano, K.2    Leadley, D.R.3    Shiraki, Y.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.