Dissociative electron attachment to the highly reactive difluoromethylene molecule-importance of CF2for negative ion formation in fluorocarbon plasmas

New Journal of Physics

Volumn 12, Issue , 2010, Pages

  Graupner, K ^a,c   Field, T A ^a   Mayhew, C A ^b  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^c LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM REACTIONS; CROSS SECTION; DISSOCIATIVE ELECTRON ATTACHMENT; FLUOROCARBON PLASMA; FOUR-ORDER; MICROWAVE PLASMA; SCATTERING CALCULATIONS; UPPER LIMITS;

ELECTRON ENERGY ANALYZERS; NEGATIVE IONS;

PHOTODISSOCIATION;

EID: 77956571091     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/12/8/083035     Document Type: Article

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