Optoelectronic system for monitoring of thin diamond layers growth

Journal of Optoelectronics and Advanced Materials

Volumn 12, Issue 8, 2010, Pages 1660-1665

  Bogdanowicz, R ^a   Gnyba, M ^a   Wroczynski, P ^a   Kosmowski, B B ^a  

^a GDANSK UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Diamond diamond like carbon layers; In situ monitoring; Optical emission spectroscopy; Raman spectroscopy

Indexed keywords

ATOMS; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; CYCLOTRONS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRON CYCLOTRON RESONANCE; IMPACT IONIZATION; LIGHT EMISSION; MOLECULES; MONITORING; OPTICAL EMISSION SPECTROSCOPY; OPTOELECTRONIC DEVICES; RAMAN SPECTROSCOPY; THIN FILMS;

CHEMICAL VAPOUR DEPOSITION; DIAMOND LIKE CARBON; IN- SITU MONITORING; MOLECULAR COMPOSITIONS; OPTICAL EMISSION SPECTROSCOPIES (OES); OPTOELECTRONIC SYSTEMS; OPTOELECTRONIC TOOLS; SYNTHESIS PARAMETERS;

FILM GROWTH;

EID: 77956430628     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (25)

1. S. Huang, H. Hsiao-Chiu, Y. Min-Sheng, Diam. Rel. Mat. 15, 22 (2006).
2. T. Sekiguchi, S. Koizumi, T. Taniguchi, J. Phys.: Condens. Matter 16, S91 (2004).
3. M. Kubovic, A. Aleksov, M. Schreck, T. Bauer, B. Stritzker, E. Kohn, Diam. Rel. Mat. 12, 403 (2003)
4. B. Paosawatyanyong, K. Honglertsakul, D. Reinhard, Diffus. defect data. Solid state data. Part B 107, 75 (2005).
5. D. Sheeja, B. K. Tay, S. M. Krishnan, L. N. Nung, Diam. Relat. Mat. 12, 1389 (2003).
6. C. Hsiao-Kuo, J. C. Sung, Diam. Rel. Mat. 10, 1584 (2001).
7. T. Sharda, M. M. Rahaman, Y. Nukaya, T. Soga, T. Jimbo, M. Umeno, Diam. Rel. Mat. 10, 561 (2001).
8. R. Fang, Q. Liang, Y. S. Ou, Thin Sol. Films 390, 197 (2001).
9. M. A. Elliott, P. W.May, J. Petherbridge, S. M. Leeds, M. N. R. Ashfold,, Diam. Relat. Mat. 9, 311 (2000).
10. C. C. Battaile, D. J. Srolovitz, J. E. Butler, J. Electron. Mater. 26, 960 (1997).
11. M. Frenklach, K. E. Spear, J. Matter Res. 3, 133 (1988).
12. M. Tsuda, M. Nakajima, S. Oikawa, J. Am. Chem. Soc. 108, 5780 (1986).
13. M. Tsuda, M. Nakajima, S. Oikawa, Jpn. J. Appl. Phys. 26, 527 (1987).
14. A. Herman, P. Wroczynski, Adv. Sci. and Technol. 6, 141 (1995).
15. I. Sobelman, Atomic Spectra and Radiative Transitions, Springer-Verlag, Berlin (1992)
16. M. Gnyba, R. Bogdanowicz, Eur. Phys. J. ST 144, 209 (2006).
17. R. Manukonda, R. Dillon, T. Furtak, J. Vac. Sci. Technol. A 13, 1150 (1995).
18. H. C. Barshilia, V. D. Vankar, J. Appl. Phys. 80, 3694 (1996).
19. S. J. Harris, A. M. Weiner, J. Appl. Phys. 67, 6520 (1990).
20. R. Bogdanowicz, M. Gnyba, P.Wroczynski, J. Phys. IV 137, 57 (2006).
21. G. Lombardi, K. Hassouni, G. D. Stancu, L. Mechold, J. Röpcke, A. Gicquel, J. Appl. Phys. 98, 533 (2005)
22. J. Asmussen, D. Reinhard, D. S. Dandy, Diamond Thin Films Handbook, Marcel Dekker, Inc., New York (2002).
23. N. Jones, W. Ahmed, I. Hassan, J. Phys.: Condens. Matter 15, 2969 (2003).
24. R. Chen, S. Rangan, C. J. Spanos, Proc. IEEE International Symposium on Semiconductor Manufacturing Conference D9 (1997).
25. K. Fabisiak, Analiza defektow w cienkich polikrystalicznych warstwach diamentowych otrzymywanych metodami CVD, Wydawnictwo UMK, Torun (1999).