Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas

Diamond and Related Materials

Volumn 9, Issue 3-6, 2000, Pages 311-316

  Elliott, M A ^a   May, P W ^a   Petherbridge, J ^a   Leeds, S M ^a   Ashfold, M N R ^a   Wang, W N ^b  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b University of Bath   (United Kingdom)

Author keywords

CO2; Microwave plasma deposition; Optical emission spectra; Plasma diagnostics

Indexed keywords

CARBON DIOXIDE; COMPOSITION EFFECTS; CRYSTAL ATOMIC STRUCTURE; EMISSION SPECTROSCOPY; ETCHING; FILM GROWTH; METHANE; MICROWAVES; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS;

BLACKBODY RADIATION; OPTICAL EMISSION SPECTROSCOPY (OES);

DIAMOND FILMS;

DIAMOND COATING; VAPOR DEPOSITION;

EID: 0034123888     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00196-X     Document Type: Conference Paper

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