Optoelectronic monitoring of plasma discharge optimized for thin diamond film synthesis

Journal De Physique. IV : JP

Volumn 137, Issue , 2006, Pages 57-60

  Bogdanowicz, R ^a   Gnyba, M ^a   Wroczynski P ^a  

^a GDANSK UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; EXCITONS; LOW TEMPERATURE EFFECTS; MOLECULAR DYNAMICS; OPTOELECTRONIC DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

HYDROGEN ATOMS; OPTICAL EMISSION SPECTROSCOPY (OES); OPTICAL PROBE; PLASMA DISCHARGE OPTIMIZATION;

DIAMOND FILMS;

EID: 33846579118     PISSN: 11554339     EISSN: 17647177     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:2006137011     Document Type: Conference Paper

References (10)

1. Petherbridge J., May P., Pearce S., Rosser K., Ashfold M., J. Appl. Phys 89(215) (2001).
2. Jianga N., Sugimotoa K., Nishimura K., Shintania Y., Hirakic A., J. Cryst. Growth 242 (2002) 362-366.
3. Hwang D., Saito T., Fujimori N., Diamond and Rel. Mat. 13 (2004) 2207-2210.
4. Frenklach M., Spear K.E., J. Matter Res. 3 (1988) 133.
5. Tsuda M., M. Nakajima, S. Oikawa, J. Am. Chem. Soc. 108 (1986) 5780.
6. Tsuda M., Nakajima M., Oikawa S., Jpn. J. Appl. Phys. 26 (1987) 527.
7. Herman A., Wroczyński P., Adv. Sci. and Technol. 6 (1995) 141-147.
8. Sobelman I., "Atomic Spectra and Radiative Transitions" (Springer, Berlin, 1992) pp. 315.
9. Manukonda R., J. Vac. Sci. Technol. A 13(3) (1995) 1150.
10. Barshilia H.C., J. Appl. Phys. 80(7) (1996) 3694-3698.